Applied Materials
9500 XR Ion
Power
Spin / Scan Power Supply Control Cable[1]
Vacuum
MRS Turbo Pump Controller[1]
Gas delivery
BF3, AS, P[1]
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing parts are listed in the source, including flight tube, dual frequency motor for H/E, HD-PFS assembly, mass spectrometer Hiden, radiator, MRS turbo pump controller, source turbo pump, spin/scan power supply control cable, suppression voltage application cable, source bushing, liner, electrode manipulator, source chamber, beam stop, PDA, VAT 100 valve, valve holder, flight tube retainer, acceleration tubes, scan encoder, beam profiler, and NW 25x150mm Frexi.
What do the numbers mean?
Power & electrical2
Vacuum & pumping2
Gas & chemistry1
Configuration & options15
- High Current[1]
- Missing Parts:[1]
- Flight Tube[1]
- Dual Frequency Motor for H/E[1]
- HD-PFS Assembly[1]
- Mass Spectrometer Hiden[1]
- Radiator[1]
- Source Bushing[1]
- Liner[1]
- Electrode Manipulator[1]
- Source Chamber[1]
- Beam Stop[1]
- PDA[1]
- VAT 100 Valve[1]
- Valve Holder[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Axcelis NV 8250— Same function class: Ion Implantation, UnknownCompare in depthsource[2]
- Axcelis NV 8250 HT Ion— Same function class: Ion Implantation, UnknownCompare in depthsource[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 9500 XR Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9500 XR Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9500 XR Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9500 XR Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 9500 XR Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 9500 XR Ion are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]Equipment inventory listing
Last updated Jul 29, 2026.
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Axcelis NV 8250 HT Ion Implanter is an 8-inch ion implanter with listed power and vacuum-related configuration details.
