Applied Materials
Centura DPS+ Poly Silicon
Wafer size
Wafer Mapping
Power
208 VAC, 3 Phase, 60 Hz[1]
Vacuum
Alcatel STPA 2203 CV at positions A, B, D[1]
Gas delivery
Seriplex[1]
What is it?
What do the numbers mean?
Power & electrical4
- RF Generator Rack[1]
Vacuum & pumping1
Wafer handling6
Gas & chemistry1
Control & software3
Configuration & options16
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of electrostatic chuck is used?
The system uses a polyimide electrostatic chuck.[1]
What is the system controller model?
The system controller is a 5200.[1]
What is the electrical input specification?
The system requires 208 VAC, 3 phase, 60 Hz, with a full load current of 250 A and maximum system rating of 90 KVA.[1]
Not publicly documented
The following facts about the Centura DPS+ Poly Silicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS+ Poly Silicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS+ Poly Silicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura DPS+ Poly Silicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura DPS+ Poly Silicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura DPS+ Poly Silicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Aug 14, 2026.
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