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Applied Materials

Centura eMax Nitride

EtchApplied Materials Centura family
Research Quality: 10% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

What do the numbers mean?

Wafer handling1

Buffer Robot
HP[1]
Accurate?

Gas & chemistry1

Gas
CF4, CH2F2, CHF3, Ar, O2, N2[1]
Accurate?

Configuration & options11

2 Chamber Emax[1]
Accurate?
1 Orienter/degas[1]
Accurate?
OS
AMAT Legacy[1]
Accurate?
CH #A - eMAX[1]
Accurate?
CH #B - eMAX[1]
Accurate?
CH #C - EMPTY[1]
Accurate?
CH #D - EMPTY[1]
Accurate?
CH #E - EMPTY[1]
Accurate?
CH #F - Orienter[1]
Accurate?
Chiller 1
AMAT Endura HX 18706-01[1]
Accurate?
Chiller 2
Thermo Electron HX 150 106178026[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasCF4, CH2F2, CHF3, Ar, O2, N2[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Centura eMax Nitride are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura eMax Nitride are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura eMax Nitride are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura eMax Nitride are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura eMax Nitride are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura eMax Nitride is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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