Waferpedia

Applied Materials

SEMVision G 3

SEMVision G 3 — Inventory photo
Fig. 01SEMVision G 3Inventory photo[1]

Wafer size

Wafer Handling

Performance

Delta X and Delta Y < 20 μm[1]

Optics

SEM column[1]

What is it?

Applied Materials SEMVision G 3 is an inspection system described with 8-inch and 12-inch wafer handling capability.

What do the numbers mean?

Wafer handling5

Wafer size
Wafer Handling[1]
Accurate?
Loader
AMAT ADO with RFID / OCLP / SMIF[1]
Accurate?
Wafer size
Wafer Rotation option included[1]
Accurate?
Wafer size
Stage wafer holder[1]
Accurate?
Pal (On the OTW, cassette / Slot 1
Delta X= 500 μms; Delta Y= 500 μm[1]
Accurate?

Optics & imaging4

SEM column[1]
Accurate?
EDX column[1]
Accurate?
45 Deg column Tilt[1]
Accurate?
Optical Microscope X5 ,X20, X100[1]
Accurate?

Performance1

ITU Repeatability
Delta X and Delta Y < 20 μm[1]
Accurate?

Control & software1

Software and workstation:[1]
Accurate?

Configuration & options9

Configuration:[1]
Accurate?
FFU with ULPA Filter[1]
Accurate?
ESC ETU 300mm / 200mm[1]
Accurate?
ITU 300mm / 200mm[1]
Accurate?
Aligner[1]
Accurate?
WorkStation SGI FULE[1]
Accurate?
TFT LCD Monitors[1]
Accurate?
IPU G3/G2[1]
Accurate?
System performance:[1]
Accurate?
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Applied Materials SEMVision G 3 Fuel Graphics CardIn Productionsource[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SEMVision G 3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEMVision G 3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SEMVision G 3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SEMVision G 3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SEMVision G 3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SEMVision G 3 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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