Applied Materials

VIISTA Trident XP Ion Implant

Ion Implantation Applied Materials VIISTA family

Research Quality: 20% complete

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VIISTA Trident XP Ion Implant — Inventory photo — Fig. 01VIISTA Trident XP Ion ImplantInventory photo^[1]

Power

OBIS 320FX w/ IS2000V(1) PSI^[1]

Vacuum

Standard^[1]

What is it?

What do the numbers mean?

Power & electrical2

Cryo Pump: OBIS 320FX w/ IS2000V(1) PSI^[1]
Frequency: 60 Hz Operation^[1]

Vacuum & pumping2

Differential pumping: Standard^[1]
Cryo Pump Facilities POC: SS Cryo Exh UP-Rough. DN-Hel.DN^[1]

Wafer handling2

Load Lock Vent: Standard Finish^[1]
Load Lock Vent Connection: Vent Connection Std Finish^[1]

Control & software1

Control system: w/ Hard disk drives^[1]

Dimensions & facilities1

Facilities (Air-N2-H2O): Faci fr Bott w Manifold - Std^[1]

Configuration & options12

Process Type: Standard^[1]
Scan Harness: Standard - Continuous^[1]
Beamline: XP^[1]
Profiler: Gen II Multipixel 2 piece cup^[1]
Process Chamber Line Kit: Full Coverage^[1]
Seismic Kit: Seismic^[1]
Chiller: SMC Remote 20M^[1]
Power Kit: Std w/3 Pole 175A^[1]
UPS: Standard UPS 3KVA^[1]
Injector Kit: XP (LDPL) Vapo Ready^[1]
Label Kit: Chinese Label Kit^[1]
Elevator Chamber selection: Standard - TGV w/Peek^[1]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Axcelis NV 8250— Same function class: Ion Implantation, UnknownCompare in depthsource^[2]
Axcelis NV 8250 HT Ion— Same function class: Ion Implantation, UnknownCompare in depthsource^[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Differential pumpingStandard^[1]
Cryo PumpOBIS 320FX w/ IS2000V(1) PSI^[1]
Cryo Pump Facilities POCSS Cryo Exh UP-Rough. DN-Hel.DN^[1]
Frequency60 Hz Operation^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the VIISTA Trident XP Ion Implant are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VIISTA Trident XP Ion Implant are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VIISTA Trident XP Ion Implant are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VIISTA Trident XP Ion Implant are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VIISTA Trident XP Ion Implant are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VIISTA Trident XP Ion Implant is not on record.
Answerable by: an OEM datasheet or a fab qualification report