ASML
PAS 5500 1150 C Wafer
The ASML PAS 5500 / 1150 C Wafer Stepper is an 8-inch wafer stepper in the lithography category. The ASML PAS 5500 / 1150 C is part of the ASML PAS 5500 family. The ASML PAS 5500 / 1150 C Wafer Stepper uses a Cymer NL7600A NanoLith laser system rated at 400V, 70A.[1][2]
What it is
How it works
The ASML PAS 5500 1150 C Wafer includes a Cymer NL7600A NanoLith laser system, a 2x2 cassette transfer loader, a mains power cabinet, a Donaldson P199100 LithoGuard filtration unit, a Rietschle Thomas SAH 55 exhaust blower, a Rietschle Thomas REL 44050 exhaust blower cabinet, a Quality Power Solutions uninterruptible power system with battery pack, and a Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner.[1][2]
The ASML PAS 5500 1150 C Wafer uses a 400V, 70A electrical setup associated with the Cymer NL7600A NanoLith laser system.[1][2]
Where it fits in the process flow
The ASML PAS 5500 1150 C Wafer belongs to ASML’s PAS 5500 family and is used for wafer lithography work.[2]
Applications
General reference — not yet source-verifiedA wafer stepper is used to print repeated circuit patterns on a wafer for semiconductor device fabrication.
What do the numbers mean?
Power & electrical2
- Cymer NL7600A NanoLith laser system, 400V, 70A, mfg 2002[1]
Vacuum & pumping4
Wafer handling3
- 2x2 cassette/transfer loader[1]
Configuration & options9
- Mains power cabinet[1]
- Donaldson P199100 LithoGuard filtration unit[1]
- Quality Power Solutions uninterruptible power system w/ battery pack[1]
- Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA[1]
- Uninterruptible power system
- Quality Power Solutions uninterruptible power system w/ battery pack[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCymer NL7600A NanoLith laser system, 400V, 70A, mfg 2002[1]
- ConfigurationRietschle Thomas SAH 55 (10) exhaust blower[1]
- ConfigurationRietschle Thomas REL 44050 (23) exhaust blower cabinet[1]
- Laser systemCymer NL7600A NanoLith laser system, 400V, 70A, mfg 2002[1]
- Exhaust blowerRietschle Thomas SAH 55 (10) exhaust blower[1]
- Exhaust blower cabinetRietschle Thomas REL 44050 (23) exhaust blower cabinet[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the PAS 5500 1150 C Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PAS 5500 1150 C Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PAS 5500 1150 C Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 5500 1150 C Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PAS 5500 1150 C Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PAS 5500 1150 C Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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