ASML
PAS 5500 300 C DUV
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Stage interferometer needs to be replaced.
What do the numbers mean?
Optics & imaging6
Configuration & options14
- Can be configured for 3" - 6"[1]
- Upgraded workstation[1]
- Extended N/A Option[1]
- Stage Interferometer Bad[1]
- CM Options:[1]
- REFL Img Sensor[1]
- PEP 1 Productivity upgrade[1]
- PEP 2 productivity upgrade[1]
- Flatness Model[1]
- LSQ Disto Model[1]
- Mark sensor[1]
- Batch streaming[1]
- Intensity 2[1]
- Aerial Key[1]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- DUV Resist InformationDocumentcornell.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the PAS 5500 300 C DUV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PAS 5500 300 C DUV are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PAS 5500 300 C DUV are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 5500 300 C DUV are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PAS 5500 300 C DUV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PAS 5500 300 C DUV are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment Resources | CNF — cnf.cornell.educnf.cornell.edu
Last updated Jul 29, 2026.
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