Waferpedia

Despatch

LCD1-16NV-3

LCD1-16NV-3 — epfl.ch
Fig. 01LCD1-16NV-3epfl.ch[1]

What is it?

The Despatch LCD1-16NV-3 is listed as an oven for polymer curing in Zone 11. The source states it is for biocompatible devices and that it supports 100mm and 150mm wafers, piece parts, nitrogen circulation, a high efficiency particulate air filter, and temperature monitoring.

What can it run?

Process applications and technology nodes documented for this tool.

  • polymer curing

What do the numbers mean?

Wafer handling1

Wafer carriers
100mm and 150mm wafers[2]
Accurate?

Configuration & options8

Equipment type
oven for polymer curing[2]
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Intended use
Only for biocompatible devices[2]
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Piece parts
allowed[2]
Accurate?
Atmosphere
nitrogen circulation[2]
Accurate?
Filter
high efficiency particulate air filter[2]
Accurate?
Temperature monitoring
possibility to monitor temperature[2]
Accurate?
Maximum temperature
350°C[2]
Accurate?
Location
Zone 11[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the Despatch LCD1-16NV-3?

It is a biocompatible oven.[3]

Where is the Despatch LCD1-16NV-3 listed in the equipment organization?

It appears under additional hot plates and ovens in the photolithography equipment area.[2][3]

Not publicly documented

The following facts about the LCD1-16NV-3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LCD1-16NV-3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the LCD1-16NV-3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the LCD1-16NV-3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the LCD1-16NV-3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the LCD1-16NV-3 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.chepfl.ch
  2. [2]epfl.chepfl.chepfl.ch
  3. [3]YES 310TA, Vacuum cure & HMDS vapor prime oven ‒ Center of MicroNanoTechnology CMi ‐ EPFLepfl.chepfl.ch
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Last updated Jul 29, 2026.

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