Waferpedia

Hitachi

S 9220 CD-SEM

Metrology & InspectionWafer Transfer Robot:Hitachi S 9220 family
Research Quality: 20% complete
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S 9220 CD-SEM — Inventory photo
Fig. 01S 9220 CD-SEMInventory photo[1]

Wafer size

Wafer Transfer Robot:

Power

208 V, 60 Hz[1]

Performance

40k-150k-200k times[2]

Optics

± 1% or 3 nm (3σ) larger value[2]

What is it?

What do the numbers mean?

Power & electrical5

Power Supply
208 V, 60 Hz[1]
Accurate?
Single Phase[1]
Accurate?
Secondary Electron Image Resolution
3 nm (acceleration voltage 0.8 kV)[2]
Accurate?
Voltage
100V[6]
Accurate?
Frequency
60 Hz[7]
Accurate?

Wafer handling5

Wafer
Notch[2]
Accurate?
Throughput
Continuous measurement mode 56 wafers / hr[2]
Accurate?
Loader System:[2]
Accurate?
Wafer Carrier -> Loader Room
Automatic transfer by wafer transfer robot[2]
Accurate?
Wafer size
Wafer Transfer Robot:[2]
Accurate?

Optics & imaging4

Length Measurement Reproducibility
± 1% or 3 nm (3σ) larger value[2]
Accurate?
For magnification exceeding 150k times, the effect of electron beam irradiation shall be excluded[2]
Accurate?
Image Magnification:[2]
Accurate?
Optical Microscope Image
Approx 110 times[2]
Accurate?

Performance1

Length Measurement Reproduction Accuracy
40k-150k-200k times[2]
Accurate?

Control & software2

HDD & Software included[1]
Accurate?
Control
Computer control, positioning control by linear encoder[2]
Accurate?

Configuration & options9

Length Measurement Method
Cursor & Line Profile Method[2]
Accurate?
Measuring Range
0.1 μm ～ 2.0 μm[2]
Accurate?
Measuring Mode
Automatic & Manual[2]
Accurate?
SEM Image
1k to 300k times[2]
Accurate?
Stage:[2]
Accurate?
Range of Movement
X-axis: 0-200 mm, Y-axis: 0-200 mm[2]
Accurate?
Drive System
Pulse Motor Drive[2]
Accurate?
Drive Speed
Max. 100 mm / sec (each X-axis & Y-axis)[2]
Accurate?
Length Measurement
Cursor & Line Profile Method[5]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Supply208 V, 60 Hz[1]
  • ConfigurationSingle Phase[1]
  • Secondary Electron Image Resolution3 nm (acceleration voltage 0.8 kV)[2]
  • Voltage100V[6]
  • Frequency60 Hz[7]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the S 9220 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9220 CD-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 9220 CD-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 9220 CD-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 9220 CD-SEM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 9220 CD-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
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Last updated Jul 29, 2026.

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