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KLA

Surfscan SP 1 TBI Particle Defect

Metrology & InspectionKLA Surfscan family
Research Quality: 40% complete
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Surfscan SP 1 TBI Particle Defect — Inventory photo
Fig. 01Surfscan SP 1 TBI Particle DefectInventory photo[1]

Power

208-240 V[1]

Optics

12 A (laser)[1]

What it is

The Surfscan SP 1 TBI supports wafer sizes of 8 and 12 inches. The system operates on 208-240 V single-phase power at 50/60 Hz, with a full load current of 24 A, a main breaker rating of 30 A, and a largest load rating of 12 A for the laser.[12][1]

What do the numbers mean?

Power & electrical4

208-240 V[1]
Accurate?
Single Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Input power
208-240 V, single phase, 50/60 Hz[1]
Accurate?

Wafer handling4

Single Foup Loader[3]
Accurate?
Wafer sizes
8 inch, 12 inch[12]
Accurate?
Wafer size (single configuration)
12 inch[3]
Accurate?
Wafer loading
Single FOUP loader[3]
Accurate?

Optics & imaging2

Rating of Largest Load
12 A (laser)[1]
Accurate?
Known Bad Ar Laser[3]
Accurate?

Configuration & options6

Full Load
24 A[1]
Accurate?
Machine Main Breaker Rating
30 A[1]
Accurate?
Phase
1 Phase[3]
Accurate?
OEM
KLA[1]
Accurate?
Model
Surfscan SP 1 TBI[1]
Accurate?
Full load current
24 A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration208-240 V[1]
  • ConfigurationSingle Phase[1]
  • Configuration50/60 Hz[1]
  • Input power208-240 V, single phase, 50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the KLA Surfscan SP 1 TBI support?

The Surfscan SP 1 TBI supports wafer sizes of 8 inches and 12 inches.[12]

What are the electrical power requirements for the Surfscan SP 1 TBI?

The system requires 208-240 V single-phase power at 50/60 Hz, with a full load current of 24 A, a main breaker rating of 30 A, and a largest load rating of 12 A for the laser.[1]

What is the model designation of this particle defect system?

The model is KLA Surfscan SP 1 TBI.[1][12][2][3]

Not publicly documented

The following facts about the Surfscan SP 1 TBI Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 TBI Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 TBI Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan SP 1 TBI Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan SP 1 TBI Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan SP 1 TBI Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (12)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]Inventory photo
  9. [9]Inventory photo
  10. [10]Inventory photo
  11. [11]Inventory photo
  12. [12]Equipment inventory listing
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Last updated Sep 1, 2026.

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