Lam Research

AutoEtch 480

EtchIntroduced 1981Produced 1981–Lam Research AutoEtch 480 family

Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What is it?

Lam Research introduced the AutoEtch 480 in 1981 as its first product. The source describes it as an automated polysilicon plasma etcher, and notes that the first system was sold in January 1982.

What can it run?

Process applications and technology nodes documented for this tool.

Polysilicon etching

What do the numbers mean?

Configuration & options1

Type: automated polysilicon plasma etcher^[1]

Vintage & configurations

1981Production start^[1]
Lam Research introduced its first product, the AutoEtch 480, in 1981.
1982-01Production start^[1]
The first system was sold in January 1982.
1982-01First system sold^[1]
The first system was sold in January 1982.

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the AutoEtch 480 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

Fewer than 3 independently cited specifications for the AutoEtch 480 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented variants, configuration options, or revision breakpoints of the AutoEtch 480 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AutoEtch 480 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AutoEtch 480 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AutoEtch 480 is not on record.
Answerable by: an OEM datasheet or a fab qualification report