Mattson
AST 2900 RTP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA rapid thermal processor heats wafers quickly with intense radiant energy, usually from lamp-based heat sources, inside a controlled process chamber.
A rapid thermal processor uses controlled process gases and closed-loop temperature control to carry out short thermal cycles on wafers.
Where it fits in the process flow
General reference — not yet source-verifiedRTP systems sit in semiconductor production lines for discrete thermal steps that occur between other wafer processing operations.
RTP processing commonly follows deposition or implantation steps and precedes later processing or characterization.
Applications
Rapid thermal processing is used for annealing after ion implantation, contact sintering, formation of thin-film oxides, crystallization of amorphous films, and thermal oxidation of silicon and compound semiconductors.[5]
What do the numbers mean?
Wafer handling1
Configuration & options5
- Condition 'A'[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AST 2900 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST 2900 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AST 2900 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AST 2900 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AST 2900 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AST 2900 RTP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]semistarcorp.comsemistarcorp.com
- [4]Mattson AST 2900 RTP System for sale — fabsurplus.comfabsurplus.com
- [5]Steag / AST 2900 RTP — Mattson | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 12, 2026.
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