Nikon
NSR 2205 i 11 C i-Line
The Nikon NSR 2205 i 11 C is an i-line stepper that processes 6-inch and 8-inch wafers. The Nikon NSR 2205 i 11 C achieves a resolution of 0.45 µm L&S and a total focus deviation of 0.45 µm L&S. The Nikon NSR 2205 i 11 C was manufactured in 2001.[1][2]
What it is
The NSR 2205 i 11 C handles wafer sizes of 6 inches and 8 inches. The system achieves a resolution of 0.45 µm line-and-space. Additional optical specifications include total focus deviation of 0.45 µm, astigmatism of 0.35 µm, inclination of0.40 µm, lens distortion of0.55 µm, magnification control accuracy of0.25 µm, and focus control accuracy of0.2 µm. The stepper was manufactured in 2001.[1][2]
What do the numbers mean?
Vintage & configurations
- 2001Production start[1]
Vintage 2001
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What is the resolution of the NSR 2205 i 11 C?
The resolution is 0.45 µm line-and-space.[2]
What is the focus control accuracy?
The focus control accuracy is 0.2 µm.[2]
What is the lens distortion specification?
The lens distortion is 0.55 µm.[2]
What year was the NSR 2205 i 11 C manufactured?
The stepper was manufactured in 2001.[1]
What is the magnification control accuracy?
The magnification control accuracy is 0.25 µm.[2]
Not publicly documented
The following facts about the NSR 2205 i 11 C i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 11 C i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 11 C i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 11 C i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 11 C i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR 2205 i 11 C i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]Inventory photo
Last updated Aug 22, 2026.
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