Nikon NSR 2205

Models in this family

1. 

   NSR 2205 EX 14 C
2. NSR 2205 i 10 C
3. NSR 2205 i 10 D i-Line

   The Nikon NSR 2205 i 10 D is an i-line stepper for 6-inch and 8-inch wafers.

4. 

   NSR 2205 i 11 C i-Lineproduced 2001–

   The Nikon NSR 2205 i 11 C is an i-line stepper that supports 6-inch and 8-inch wafers, with a listed resolution of 0.40 µm (0.45 µm L&S), and was produced in 2001.

5. 

   NSR 2205 i 11 D i-Line

   The Nikon NSR 2205 i 11 D i-Line Stepper is a Nikon lithography stepper specified for 4-inch wafers.

6. 

   NSR 2205 i 12 D

   Nikon NSR 2205 i 12 D is a test and probe system used to electrically evaluate semiconductor devices and related structures. It belongs to the class of equipment that contacts or senses test nodes on a wafer or die to measure device behavior and verify function.

7. 

   NSR 2205 i 12 D i-Line

   The Nikon NSR 2205 i 12 D is an i-line stepper used in photolithography, available in 6-inch and 8-inch wafer configurations.

8. 

   NSR 2205 i 14 E 2 i-Line

   Nikon NSR 2205 i 14 E 2 is an i-line stepper.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NSR 2205 i 14 E 2	i-Line	2001–2008	Sources show different listed vintages and configurations across entries, including Asahi N 4 A-C or Asahi N 4 Z chamber, different computer types, and MCSV versions 3.43 C, 3.46 C, and 3.46 D.	Equipment inventory listing[1]

9. 

   NSR 2205 i 8
10. 

    NSR 2205 i 8 A i-Line

    Nikon NSR 2205 i 8 A i-Line Stepper is a 6-inch wafer lithography stepper with a listed 0.5 µm resolution.

Sources