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Nikon

NSR 2205 i 11 D i-Line

LithographyNikon NSR 2205 family
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NSR 2205 i 11 D i-Line — Inventory photo
Fig. 01NSR 2205 i 11 D i-LineInventory photo[1]

Performance

1.17%[1]

Optics

X: 17 nm[1]

What is it?

The Nikon NSR 2205 i 11 D i-Line Stepper is a Nikon lithography stepper specified for 4-inch wafers.

What do the numbers mean?

Optics & imaging2

X: 17 nm[1]
Accurate?
Y: 20 nm[1]
Accurate?

Performance1

Uniformity
1.17%[1]
Accurate?

Control & software1

With HDD & Software[1]
Accurate?

Configuration & options4

Lamp Power
570.2 mW / cm2[1]
Accurate?
TFD
0.410 µm[1]
Accurate?
Astigmatism
0.328 µm[1]
Accurate?
Stepping 3 Sigma:[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 2205 i 11 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 11 D i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 11 D i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 2205 i 11 D i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2205 i 11 D i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2205 i 11 D i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
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Last updated Jul 29, 2026.

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