Nikon
NSR 2205 i 11 D i-Line
What it is
How it works
General reference — not yet source-verifiedA lithography stepper transfers a reticle pattern onto photoresist on a wafer by exposing one field at a time. A stepper repeats that exposure across the wafer with indexed stage motion between shots. i-line steppers belong to the optical lithography class used to define patterned layers during wafer fabrication.
Where it fits in the process flow
General reference — not yet source-verifiedLithography tools are used after wafer surface preparation and photoresist coating, and before resist development and pattern transfer. A stepper sits in the patterning sequence that connects coating, alignment, exposure, development, etch, and related inspection operations.
Applications
General reference — not yet source-verifiedi-line steppers are used to print patterned layers for semiconductor device fabrication. Such tools support repeated pattern transfer for process layers that require optical alignment and field by field exposure on resist coated wafers.
What do the numbers mean?
Wafer handling1
Optics & imaging6
Performance1
Control & software3
- With HDD & Software[1]
Configuration & options11
- Stepping 3 Sigma:[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Canon FPA 2500 i 3 i-Line— Same function class: Lithography, nullCompare in depthsource[8]
- Canon FPA 3000 i 4 i-Line— Same function class: Lithography, nullCompare in depthsource[8]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NSR 2205 i 11 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 11 D i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 11 D i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 11 D i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 11 D i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 11 D i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]waferpedia.com — waferpedia.comwaferpedia.com
- [8]Equipment inventory listing
- [9]Equipment inventory listing
Last updated Oct 20, 2026.
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The Canon FPA 2500 i 3 is an i-line stepper for 8-inch wafers with a 5-inch reticle.
Canon FPA 3000 i 4 i-Line Stepper is an 8-inch lithography stepper with i-line designation.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.