Waferpedia

Nikon

NSR 2205 i 12 D i-Line

LithographyNikon NSR 2205 family
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NSR 2205 i 12 D i-Line — Inventory photo
Fig. 01NSR 2205 i 12 D i-LineInventory photo[1]

What is it?

The Nikon NSR 2205 i 12 D is an i-line stepper used in photolithography, available in 6-inch and 8-inch wafer configurations.

What do the numbers mean?

Wafer handling7

Factory Interface
Open Cassette (2)[4]
Accurate?
Vax Station, Pin Chuck[4]
Accurate?
Handler Sytem
WL Type 3[4]
Accurate?
Wafer size
6 inch[5]
Accurate?
Wafer size
8 inch[6]
Accurate?
Controller/chuck
Vax Station, Pin Chuck[4]
Accurate?
Handler system
WL Type 3[4]
Accurate?

Performance1

Uniformity
0.93% (at most recent lamp change in May 2025)[4]
Accurate?

Control & software1

Software Version
MCSV 2.41, OCSV 2.41[4]
Accurate?

Configuration & options6

CIM
SECS[4]
Accurate?
Process
Photolithography[4]
Accurate?
Power
674mW/cm2 (at most recent lamp change in May 2025)[4]
Accurate?
TFD
0.332um (July 2025)[4]
Accurate?
Astigmatism
0.259um (July 2025)[4]
Accurate?
Tool type
i-Line Stepper[5]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What is the process type of this tool?

The process is photolithography.[4]

What factory interface is used?

The factory interface uses an open cassette system (two cassettes).[4]

Not publicly documented

The following facts about the NSR 2205 i 12 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 12 D i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 12 D i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 2205 i 12 D i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2205 i 12 D i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2205 i 12 D i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
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Last updated Aug 31, 2026.

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