Nikon
NSR SF 155 i-Line
Power
7.5 KW (SUV 7500 NI)[1]
Gas delivery
FIA Modification for Colored Resist[1]
Optics
SRI 12 M 4 IL 2 SS[1]
What is it?
What do the numbers mean?
Power & electrical1
Wafer handling1
Gas & chemistry1
Optics & imaging3
- Lens & Illumination:[1]
Control & software2
Configuration & options12
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NSR SF 155 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR SF 155 i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR SF 155 i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR SF 155 i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR SF 155 i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR SF 155 i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Nikon NSR SF 155 i-Line Stepper : Complete Technical Guide, Specifications, Applications & Buying Insights - JUNR-Wuxi Junr Technology Co., Ltd. — junr.com.cnjunr.com.cn
- [3]尼康 NSR SF 155 i-Line 步进式光刻机 ：技术指南、规格参数、应用领域 - 半导体设备及配件,CP和PCM测试配件 — junr.com.cnjunr.com.cn
- [4]Nikon Precision | Global Site — nikonprecision.com (Jun 27, 2015)web.archive.org
Last updated Jul 29, 2026.
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