Oxford Instruments

PRS900

Wet Processing / Clean 6"Oxford Instruments PRS900 family

Research Quality: 40% complete

LinkedIn X Email

PRS900 — epfl.ch — Fig. 01PRS900epfl.ch^[1]

Wafer size

Performance

0.035 um/min^[1]

Gas delivery

dedicated to dry resist stripping^[1]

What is it?

The Oxford PRS900 plasma stripper is described as a barrel reactor dedicated to dry resist stripping, with purely chemical and isotropic etching processes. The system uses oxygen plasma, is completely computer driven, and loads wafers via a quartz samples carrier that can accept up to 25 wafers.

What can it run?

Process applications and technology nodes documented for this tool.

dry resist stripping
stripping of PR residuals after photolithography
stripping of about 1 µm of PR
stripping of about 2 µm of PR

Why won't it start?

Documented failure modes, common issues, and field considerations.

Microelectronic compatibility is required; Cu, Ag, Au, and Cr are forbidden materials

What do the numbers mean?

Power & electrical1

Plasma source: oxygen plasma (RF capacitive or micro-wave)^[1]

Wafer handling3

Carrier: quartz samples carrier^[1]
Carrier wafer size: 4 or 6 inches^[1]
Batch capacity: up to 25 wafers^[1]

Gas & chemistry2

Process: dedicated to dry resist stripping^[1]
Etching character: purely chemical and isotropic^[1]

Performance1

Resistance etch rate used at CMi: 0.035 um/min^[1]

Control & software1

Automation: completely computer driven^[1]

Configuration & options1

Tool type: plasma stripper; barrel reactor^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Processdedicated to dry resist stripping^[1]
Etching characterpurely chemical and isotropic^[1]
Plasma sourceoxygen plasma (RF capacitive or micro-wave)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PRS900 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PRS900 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PRS900 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PRS900 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PRS900 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PRS900 are on record.
Answerable by: an OEM parts catalog or a service engineer