Plasma-Therm
Versaline LACVD
What is it?
What do the numbers mean?
Power & electrical2
Vacuum & pumping1
- thermally managed chamber liner and pump train[1]
Wafer handling2
Gas & chemistry8
Control & software3
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGases and maximum flows in positions 1 to 8 respectively are:[1]
- ConfigurationCF4 (84 sccm)[1]
- ConfigurationO2 (1000 sccm)[1]
- ConfigurationAr (50 sccm)[1]
- ConfigurationO2 (50 sccm)[1]
- ConfigurationCHF3 (100 sccm)[1]
- ConfigurationN2 (200 sccm)[1]
- ConfigurationH2 (100 sccm)[1]
- ConfigurationICP source 2 MHz up to 2000 W with temperature control[1]
- ConfigurationCCP source 13.56 MHz up to 600 W[1]
- Configurationthermally managed chamber liner and pump train[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Versaline LACVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versaline LACVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Versaline LACVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Versaline LACVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Versaline LACVD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Versaline LACVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.