Plasma-Therm
Versaline VLN ICP
Wafer size
Brooks TM (Transfer Module) with four Wafer Manual Load Lock
Power
208V, 60 Hz, 3 phase[1]
Vacuum
No pumps or chiller included[1]
What is it?
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
Wafer handling2
- Manual Load Lock for Single or Multiple Wafers[1]
Gas & chemistry2
Control & software2
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[1]
- ConfigurationENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[1]
- ConfigurationVAT PM5 Pressure Controller with Leybold Turbo pump[1]
- ConfigurationSeiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller[1]
- Configuration(5) MFCs-gas with Isolation, Process and By-pass valves[1]
- Voltage208V, 60 Hz, 3 phase[1]
- ConfigurationNo pumps or chiller included[1]
- Configuration(6) MFCs-gas with Isolation, Process and By-pass valves[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Versaline VLN ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versaline VLN ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Versaline VLN ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Versaline VLN ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Versaline VLN ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Versaline VLN ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
Last updated Jul 29, 2026.
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