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Plasma-Therm

Versalock 700 ICP

EtchPlasma-Therm Versalock 700 ICP family
Research Quality: 30% complete
Versalock 700 ICP — Inventory photo
Fig. 01Versalock 700 ICPInventory photo[1]

Power

3 Phase[2]

Vacuum

3 Edward Pumps[1]

What is it?

The Plasma-Therm Versalock 700 ICP is an inductively coupled plasma etcher.

What do the numbers mean?

Power & electrical3

Phase
3 Phase[2]
Accurate?
Frequency
60 Hz[2]
Accurate?
Voltage
208V[2]
Accurate?

Vacuum & pumping1

3 Edward Pumps[1]
Accurate?

Control & software1

Vortex Computer Update[1]
Accurate?

Configuration & options2

Dual Chamber Etcher[1]
Accurate?
2 Neslab Chillers[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration3 Edward Pumps[1]
  • Phase3 Phase[2]
  • Frequency60 Hz[2]
  • Voltage208V[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Versalock 700 ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versalock 700 ICP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Versalock 700 ICP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Versalock 700 ICP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Versalock 700 ICP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Versalock 700 ICP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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