Signatone

WL-210

Test & Probe up to 8-inch wafers Signatone WL-210 family

Research Quality: 60% complete

The Signatone WL-210 is an RF / Microwave probe station. The Signatone WL-210 accepts shards through 8-inch wafers, substrates, PCB's, and ultra-thin wafers. The Signatone WL-210 includes a compound X-Y stage for sub-micron positioning.^[1]^[2]

WL-210 — web.archive.org — Fig. 01WL-210web.archive.org^[1]

Plate 01シグナトーン社製 WL-210 の概略ご紹介
阪和トレーディング株式会社Watch on YouTube
Plate 02シグナトーン社製プローバー、WL-210 のご紹介
阪和トレーディング株式会社Watch on YouTube

Wafer size

up to 8-inch wafers

Power

RF / Microwave Probe Station^[1]

What it is

The Signatone WL-210 is an RF and microwave probe station for on-wafer test and probing.^[1]^[3]^[2]

The WL-210 belongs to Signatone's WaveLink series and uses a manual probe-station architecture.^[1]^[4]

How it works

The WL-210 uses a compound X-Y stage, platen height control, and a tilt-back microscope for access during probing. The WL-210 also supports non-ferrous chuck and stage construction, chuck biasing options, and multiple micropositioner mounting methods.^[1]^[2]

Where it fits in the process flow

General reference — not yet source-verified

The WL-210 fits in wafer-level electrical test rather than in front-end wafer fabrication. The WL-210 is used after structures or devices exist on the wafer so they can be contacted for measurement, verification, and characterization.

Applications

The WL-210 is used for RF and microwave probing, failure analysis, and R and D.^[1]^[2]

RF & MW probing
Failure Analysis

What do the numbers mean?

Power & electrical2

Type: RF / Microwave Probe Station^[1]
RF applications: Up to 110GHz^[3]

Vacuum & pumping1

Micropositioner support: Supports bolt-down, vacuum, and magnetic base micropositioners^[1]

Wafer handling5

Wafer/substrate compatibility: Accepts shards through 8" wafers, substrates, PCB's, and ultra-thin wafers^[1]
Chuck and stage assembly: Non-ferrous chuck and stage assembly reduces magnetic interference and crosstalk^[1]
Chuck biasing: Banana / BNC / Triax chuck biasing^[1]
Chuck XY stage travel range: 205 mm x 205 mm (8.07 x 8.07 in)^[3]
Standard wafer chuck diameter: 203 mm^[3]

Control & software2

Platen control: Independent platen height (locking) and contact / separate control^[1]
Platen height control: Independent platen height (locking) and contact / separate control^[1]

Configuration & options14

Base: Massive 2" one-piece machined aircraft aluminum base for stability^[1]
Platen: Large heavy-duty nickel steel platen with 4 point planar lift^[1]
Positioning stage: Fast, accurate and repeatable compound X-Y stage for sub-micron positioning^[1]
Probe card holder: Quick-Change probe card holder option with independent theta adjust^[1]
Microscope: Tilt-back microscope provides unobstructed fixturing access^[1]
Series: WaveLink Series^[1]
Base: Massive 2" one-piece machined aircraft aluminum base^[1]
Microscope access: Tilt-back microscope provides unobstructed fixturing access^[1]
Supported DUT sizes: 25mm, 75mm, 100mm, 150mm, 200mm^[3]
mmW range: 110GHz -1.5THz^[3]
High power application: Up to 12KV /600A^[3]
Temperature capability: Ambient, +300°C^[3]
Positioning stage: Compound X-Y stage for sub-micron positioning^[1]
Quick-change probe card holder: Quick-Change probe card holder option with independent theta adjust^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
WL-210E	—	—	E-Manual station with remote motor control, environmental chamber support for electrical shielding or frost-free probing, a 10:1 vernier switch, and full upgradeability including thermal and semi-automatic configurations.	web.archive.org^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Micropositioner supportSupports bolt-down, vacuum, and magnetic base micropositioners^[1]
TypeRF / Microwave Probe Station^[1]
RF applicationsUp to 110GHz^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What types of devices can be probed?General reference — not yet source-verified

Any semiconductor device with exposed conductive pads can be probed, including discrete transistors, diodes, integrated circuit test structures, and passive components, as long as the pad size and pitch are compatible with the probe tips and microscope optics.

What equipment is typically connected to a probe station of this class?General reference — not yet source-verified

Commonly connected instruments include source-measure units, semiconductor parameter analyzers, capacitance meters, and low-noise current amplifiers. The station itself provides the mechanical probing interface while the external instruments perform the electrical stimulation and measurement.

Not publicly documented

The following facts about the WL-210 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WL-210 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the WL-210 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WL-210 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WL-210 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WL-210 are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]WL-210 — Signatone | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]signatone.com — signatone.comsignatone.com
[4]Signatone WL-210 family | Waferpedia — waferpedia.comwaferpedia.com