Waferpedia

SUSS MicroTec

MA 200 Mask

LithographySUSS MicroTec MA 200 family
Research Quality: 20% complete
MA 200 Mask — Inventory photo
Fig. 01MA 200 MaskInventory photo[1]

What is it?

What do the numbers mean?

Optics & imaging4

UV400/cont/W-200 optics[1]
Accurate?
Mask Holder with Guard[1]
Accurate?
DVM8 with Sony cameras-machine level[1]
Accurate?
L25X Objective (quantity 2)[1]
Accurate?

Configuration & options6

With CIC1000 lamp housing[1]
Accurate?
Semi-automatic[1]
Accurate?
Hardware
Intel Standard[1]
Accurate?
365/405 dual range sensor[1]
Accurate?
Field Expanders[1]
Accurate?
SUSS AL3000 Auto Align system[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the MA 200 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 200 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MA 200 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MA 200 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MA 200 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MA 200 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →