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Teradyne

ETS 364

Test & ProbeTeradyne ETS 364 family
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ETS 364 — Inventory photo
Fig. 01ETS 364Inventory photo[1]

What it is

General reference — not yet source-verified

A tester in semiconductor manufacturing is electronic test equipment used to stimulate a device, measure its responses, and determine whether the device meets its intended electrical behavior. Test systems of this class are commonly configured with instrument resources, pin electronics, timing resources, control software, and an interface to the device under test.

How it works

General reference — not yet source-verified

Semiconductor test systems operate by applying programmed signals to device terminals and comparing measured outputs against expected results. Test systems of this class generally combine digital resources, analog resources, timing measurement capability, current or voltage measurement functions, and software control so that different test routines can be executed on the same platform.

Where it fits in the process flow

General reference — not yet source-verified

Semiconductor electrical test sits after wafer fabrication has created the device structures and after packaging when the device is tested in final form, depending on the manufacturing flow and the test cell arrangement. Test equipment of this class is used where electrical functionality, timing behavior, and parametric performance need to be verified before devices move to later assembly, qualification, or shipment stages.

Applications

General reference — not yet source-verified

Semiconductor testers are used to execute production test, characterization, screening, and debug tasks on integrated circuits and related electronic devices. Test platforms of this class can support digital and analog measurements, timing checks, and current or voltage evaluation across device pins through a programmed test sequence.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Source states the tester's various instruments have 80 µV resolution.

What do the numbers mean?

Vacuum & pumping1

System License
Turbo[3]
Accurate?

Control & software3

Interface Card
ASM 2091[2]
Accurate?
Interface Card
ASM 2175 G[3]
Accurate?
Operating System
Windows NT[2]
Accurate?

Configuration & options45

APU 12 analog PIN unit, P/N
ASM 2160 (8)[6]
Accurate?
Smart PIN Unit SPU 112, P/N
ASM 1512 (6)[6]
Accurate?
Assy, Booster, SPU 112, P/N
ASM 1517 (3)[6]
Accurate?
Board, HPU 25/100, P/N
ASM 1540 (2)[6]
Accurate?
Quad Measurement System (QMS), P/N
ASM 1632[6]
Accurate?
Digital PIN Unit, P/N
DPU 16[6]
Accurate?
Quad Time Measurement Unit, P/N
ASM 2368[6]
Accurate?
BD, Family High Current Mux, P/N
ASM 4519[6]
Accurate?
ETS 364 B License to 128 Dig PIN, P/N
SVC 128 P[6]
Accurate?
CPU
NT[2]
Accurate?
Ram
523.7 KB[2]
Accurate?
HDD
40 GB[2]
Accurate?
OS
Windows NT[2]
Accurate?
Shell Version
4.03 e[2]
Accurate?
System License
E 1 G[2]
Accurate?
CPU
Xeon[3]
Accurate?
Ram
2 GB[3]
Accurate?
HDD
298 GB[3]
Accurate?
OS
XP[3]
Accurate?
Shell Version
2013 A[3]
Accurate?
with Esmo Ikarus Manipulator[7]
Accurate?
Eagle shell
Eagle vision 2005[8]
Accurate?
Phase
2 Phase[5]
Accurate?
Analog PIN Unit (APU 12)
P/N: ASM 2160 (8 units)[6]
Accurate?
Smart PIN Unit (SPU 112)
P/N: ASM 1512 (6 units)[6]
Accurate?
Booster SPU 112
P/N: ASM 1517 (3 units)[6]
Accurate?
Board HPU 25/100
P/N: ASM 1540 (2 units)[6]
Accurate?
Quad Measurement System (QMS)
P/N: ASM 1632[6]
Accurate?
Digital PIN Unit (DPU 16)
P/N: DPU 16[6]
Accurate?
Quad Time Measurement Unit
P/N: ASM 2368[6]
Accurate?
Family High Current Mux
P/N: ASM 4519[6]
Accurate?
License
ETS 364 B License to 128 Dig PIN, P/N: SVC 128 P[6]
Accurate?
Vintage
2022[6]
Accurate?
Make
Teradyne / Eagle[1]
Accurate?
Model
ETS 364[1]
Accurate?
Equipment type
Tester[1]
Accurate?
OEM
Teradyne / Eagle[6]
Accurate?
APU
12 analog PIN unit, P/N: ASM 2160 (8)[6]
Accurate?
Smart PIN unit
SPU 112, P/N: ASM 1512 (6)[6]
Accurate?
Booster
Assy, Booster, SPU 112, P/N: ASM 1517 (3)[6]
Accurate?
Board
HPU 25/100, P/N: ASM 1540 (2)[6]
Accurate?
Measurement system
Quad Measurement System (QMS), P/N: ASM 1632[6]
Accurate?
Digital PIN unit
DPU 16[6]
Accurate?
Time measurement unit
Quad Time Measurement Unit, P/N: ASM 2368[6]
Accurate?
High current mux board
BD, Family High Current Mux, P/N: ASM 4519[6]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System LicenseTurbo[3]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Teradyne / Eagle ETS 364 HCMUX AdapterIn Productionsource[15]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What is the Teradyne / Eagle ETS 364?

The Teradyne / Eagle ETS 364 is a tester.[1][6][16][17][2]

Not publicly documented

The following facts about the ETS 364 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ETS 364 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ETS 364 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ETS 364 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the ETS 364 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the ETS 364 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (19)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]Equipment inventory listing
  10. [10]Equipment inventory listing
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
  14. [14]Equipment inventory listing
  15. [15]Equipment inventory listing
  16. [16]Equipment inventory listing
  17. [17]Equipment inventory listing
  18. [18]Production Board Test (PCB testing) - Teradyne — teradyne.com (May 5, 2026)web.archive.org
  19. [19]CN103905044A - Stair-step voltage ramp module including programmable gain amplifier - Google Patents — patents.google.compatents.google.com
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Last updated Oct 20, 2026.

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