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Teradyne

ETS 364

Test & ProbeTeradyne ETS 364 family
Research Quality: 40% complete
ETS 364 — Inventory photo
Fig. 01ETS 364Inventory photo[1]

What is it?

Applications

The ETS 364 is used for electrical test of integrated circuits, including mixed-signal devices and converter-oriented test where analog stimulus and precise measurement are required.[15]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Source states the tester's various instruments have 80 µV resolution.

What do the numbers mean?

Vacuum & pumping1

System License
Turbo[3]
Accurate?

Control & software2

Interface Card
ASM 2091[2]
Accurate?
Interface Card
ASM 2175 G[3]
Accurate?

Configuration & options22

APU 12 analog PIN unit, P/N
ASM 2160 (8)[5]
Accurate?
Smart PIN Unit SPU 112, P/N
ASM 1512 (6)[5]
Accurate?
Assy, Booster, SPU 112, P/N
ASM 1517 (3)[5]
Accurate?
Board, HPU 25/100, P/N
ASM 1540 (2)[5]
Accurate?
Quad Measurement System (QMS), P/N
ASM 1632[5]
Accurate?
Digital PIN Unit, P/N
DPU 16[5]
Accurate?
Quad Time Measurement Unit, P/N
ASM 2368[5]
Accurate?
BD, Family High Current Mux, P/N
ASM 4519[5]
Accurate?
ETS 364 B License to 128 Dig PIN, P/N
SVC 128 P[5]
Accurate?
CPU
NT[2]
Accurate?
Ram
523.7 KB[2]
Accurate?
HDD
40 GB[2]
Accurate?
OS
Windows NT[2]
Accurate?
Shell Version
4.03 e[2]
Accurate?
System License
E 1 G[2]
Accurate?
CPU
Xeon[3]
Accurate?
Ram
2 GB[3]
Accurate?
HDD
298 GB[3]
Accurate?
OS
XP[3]
Accurate?
Shell Version
2013 A[3]
Accurate?
with Esmo Ikarus Manipulator[6]
Accurate?
Eagle shell
Eagle vision 2005[7]
Accurate?
Interested in this tool?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System LicenseTurbo[3]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Teradyne / Eagle ETS 364 HCMUX AdapterIn Productionsource[14]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What does a test and probe system do?General reference — not yet source-verified

It makes temporary electrical contact to semiconductor devices and runs automated measurements to determine whether the devices behave as expected.

Where is this class of equipment used in semiconductor manufacturing?General reference — not yet source-verified

It is generally used near the front end of the flow, before packaging, when devices can still be contacted directly for electrical evaluation.

What kinds of tests can such a machine perform?General reference — not yet source-verified

Such systems can perform continuity checks, parametric measurements, and functional electrical testing, depending on the test program and supporting electronics.

Why is probing important in production test?General reference — not yet source-verified

Probing allows temporary access to devices so they can be measured and screened without permanent attachment, which supports early defect detection and sorting.

Not publicly documented

The following facts about the ETS 364 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ETS 364 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ETS 364 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ETS 364 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the ETS 364 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the ETS 364 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (18)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]Equipment inventory listing
  9. [9]Equipment inventory listing
  10. [10]Equipment inventory listing
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
  14. [14]Equipment inventory listing
  15. [15]CN103905044A - Stair-step voltage ramp module including programmable gain amplifier - Google Patentspatents.google.compatents.google.com
  16. [16]Equipment inventory listing
  17. [17]Equipment inventory listing
  18. [18]Production Board Test (PCB testing) - Teradyneteradyne.com (May 5, 2026)web.archive.org
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Last updated Jul 30, 2026.

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