Tokyo Electron
Clean Track Act 12
What is it?
What do the numbers mean?
Power & electrical4
- Power Box Model PB121-I150-YA-L1T, 200-200V/ 3ph/ 50~60Hz,[2]
- SMC Thermo-Con Model INR-244-265A-3004-X17 Recirculating Temperature Controller, 200V/3ph/60Hz[2]
- PolyScience DuraChill Model DCA304D1 Recirculating Temperature Controller, 200-230V/3ph/50-60Hz[2]
- Shinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System, 200-230V/3ph/50-60Hz[2]
Gas & chemistry2
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration2 Coating units and 2 Developers[1]
- ConfigurationPower Box Model PB121-I150-YA-L1T, 200-200V/ 3ph/ 50~60Hz,[2]
- Configuration2-Door Stainless Steel Solvent Distribution Station Complete with:[2]
- ConfigurationSMC Thermo-Con Model INR-244-265A-3004-X17 Recirculating Temperature Controller, 200V/3ph/60Hz[2]
- ConfigurationPolyScience DuraChill Model DCA304D1 Recirculating Temperature Controller, 200-230V/3ph/50-60Hz[2]
- ConfigurationShinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System, 200-230V/3ph/50-60Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Clean Track Act 12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Clean Track Act 12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Clean Track Act 12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Clean Track Act 12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Clean Track Act 12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Clean Track Act 12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Coater/Developers | Tokyo Electron — tel.com (Apr 15, 2012)web.archive.org
Last updated Jul 29, 2026.
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