Clean Track Mark 8 Track

The Tokyo Electron Clean Track Mark 8 Track is a coater/developer track system for wet processing in semiconductor manufacturing. The Tokyo Electron Clean Track Mark 8 Track belongs to the Clean Track family. The Tokyo Electron Clean Track Mark 8 Track is categorized as wet processing / clean equipment.^[4]

The Tokyo Electron Clean Track Mark 8 Track is configured with a Panasonic main arm motor. The Tokyo Electron Clean Track Mark 8 Track uses an indexer with a two-block normal cassette configuration. The Tokyo Electron Clean Track Mark 8 Track configuration includes one coater module, two developer modules, one ADH module, hot modules noted as eight each, cool modules noted as three each, and one WDS module.^[1][4]

Coater and developer tracks sit in the lithography flow around the exposure step. A track tool generally receives wafers after prior film formation or surface preparation, coats and conditions the resist, and then returns wafers for alignment and exposure. After exposure, a track tool generally performs post-exposure thermal treatment and development before wafers move on to inspection, etch, implant, or other pattern-transfer steps.

Coater and developer tracks are used for photoresist coating and resist development in semiconductor patterning. Such systems are applied where uniform liquid films, controlled bake steps, and repeatable wet development are required. Such systems can also support adjacent clean-process functions associated with lithography preparation and post-exposure resist processing.