YES

450PB

Thermal / Diffusion 200mm YES 450PB family

Research Quality: 40% complete

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450PB — web.archive.org — Fig. 01450PBweb.archive.org^[1]

Plate 01Video 1 - Yield Engineering Systems (YES) 450PB Polyimide Bake Oven w/PLC Upgrade (ID# SO9591)
ClassOneEngineeringWatch on YouTube
Plate 02Yield Engineering YES 450PB Polymide Bake Oven #60341
Bid ServicellcWatch on YouTube

Wafer size

200mm

Vacuum

MEMS high vacuum cure ovens^[1]

Gas delivery

Up to four process gases^[2]

What is it?

The sources describe the YES-450PB Series as high vacuum cure ovens for applications including polyimide bake, BCB bake, copper anneal, low-k dielectric cure, copper oxide removal, and aluminum anneal. The series is described as using vertical laminar airflow and a unique cooling package, and a high-vacuum variant is stated to support moisture removal and moisture prevention. A related stainless-steel cassette product is explicitly designed for use with YES-450PB Series ovens.

What can it run?

Process applications and technology nodes documented for this tool.

Polyimide bake
BCB bake
Copper anneal
Low-K dielectric cure
Copper oxide removal
Aluminum anneal
Wafer dehydration
Getter activation
Gas desorption
Metal annealing
Thin film resistor thermal treatments
Silane vapor deposition
Moisture removal
Film sealing

What do the numbers mean?

Vacuum & pumping4

Series type: MEMS high vacuum cure ovens^[1]
High vacuum: 10-6^[1]
Pressure range: 50-500 Torr^[2]
Laminar flow pressure range: 0.50-500 Torr^[2]

Wafer handling3

Cassette construction: 316L SST welded, electro-polished construction with no screws or fasteners^[3]
Cassette temperature suitability: 316L SST suitable up to 760°C; recommended continuous operating temperature without distortion is 500°C^[3]
Cassette sizes: 25-wafer cassettes: 2 inch, 3 inch, 100mm, 125mm, 150mm, 150mm short, 200mm, 200mm short, 300mm, and 300mm load port; 13-wafer cassettes: 300 mm and 300mm load port^[3]

Gas & chemistry1

Process gases: Up to four process gases^[2]

Configuration & options2

Maximum process temperature: Up to 450°C^[1]
Cooling package: Air-only cooling package; no water^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
YES-450PB-HV	—	—	High-vacuum variant designed for complete moisture and hydrogen removal using high vacuum and high temperature.	web.archive.org^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Series typeMEMS high vacuum cure ovens^[1]
High vacuum10-6^[1]
Pressure range50-500 Torr^[2]
Laminar flow pressure range0.50-500 Torr^[2]
Process gasesUp to four process gases^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 450PB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450PB are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 450PB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 450PB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 450PB is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 450PB are on record.
Answerable by: an OEM parts catalog or a service engineer