YES
450PB
The YES 450PB is a high temperature vacuum cure oven series. The YES 450PB Series supports 200 mm wafers. The YES 450PB Series operates up to 450°C.[1][2]
Plate 01Video 1 - Yield Engineering Systems (YES) 450PB Polyimide Bake Oven w/PLC Upgrade (ID# SO9591)
ClassOneEngineeringWatch on YouTubePlate 02Yield Engineering YES 450PB Polymide Bake Oven #60341
Bid ServicellcWatch on YouTube
How it works
The YES 450PB Series uses vertical laminar airflow paired with a chamber cooling package. The vertical laminar flow carries particulates away from wafers and directs airflow from the top of the system and out the bottom. The YES 450PB Series cooling package supports faster chamber cooling and temperature uniformity control, and the cooling package uses air rather than water. The YES-PB Series tools use a coalescing condensate trap assembly to control the accumulation and disposal of solvent condensates. The YES-450PB-HV is designed for complete and permanent moisture and hydrogen removal using high vacuum of 10-6 and temperatures up to 450°C. The YES-450PB-HV uses a nitrogen purge before process preparation.[1]
Where it fits in the process flow
The YES 450PB Series is intended for cure processes in which residual solvent removal, uniform temperature distribution, pressure control, dry inert atmosphere, and control of heating and cooling rates are critical steps. The YES 450PB Series can be used with stainless steel process cassettes designed for the series, and the wafers are placed vertically in the oven to facilitate laminar flow processing.[1][2]
What can it run?
Process applications and technology nodes documented for this tool.
- Polyimide bake
- BCB bake
- Copper anneal
- Low-K dielectric cure
- Copper oxide removal
- Aluminum anneal
- Wafer dehydration
- Getter activation
- Gas desorption
- Metal annealing
- Thin film resistor thermal treatments
- Silane vapor deposition
- Moisture removal
- Film sealing
What do the numbers mean?
Vacuum & pumping8
Wafer handling6
- Cassette construction
- 316L SST welded, electro-polished construction with no screws or fasteners[2]
- Cassette temperature suitability
- 316L SST suitable up to 760°C; recommended continuous operating temperature without distortion is 500°C[2]
- Cassette sizes
- 25-wafer cassettes: 2 inch, 3 inch, 100mm, 125mm, 150mm, 150mm short, 200mm, 200mm short, 300mm, and 300mm load port; 13-wafer cassettes: 300 mm and 300mm load port[2]
Gas & chemistry1
Configuration & options6
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-450PB-HV | — | — | High-vacuum variant designed for complete moisture and hydrogen removal using high vacuum and high temperature. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Series typeMEMS high vacuum cure ovens[1]
- High vacuum10-6[1]
- Pressure range50-500 Torr[3]
- Laminar flow pressure range0.50-500 Torr[3]
- Process gasesUp to four process gases[3]
- Equipment typeHigh vacuum cure oven series[1]
- High vacuum variantYES-450PB-HV[1]
- High vacuum level10-6 Torr[1]
- Tool typehigh-temperature vacuum cure oven series[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is the YES 450PB?
The YES 450PB is a high temperature vacuum cure oven series for MEMS and semiconductor process applications.[1]
What airflow approach does the YES 450PB Series use?
The YES 450PB Series uses vertical laminar airflow, with flow directed from the top of the system and out the bottom.[1]
How does the YES 450PB Series manage solvent condensate?
The YES-PB Series tools use a coalescing condensate trap assembly to control the accumulation and disposal of solvent condensates.[1]
What processes is the YES 450PB Series used for?
The YES 450PB Series is used for polyimide bake, BCB bake, copper anneal, low-k dielectric cure, copper oxide removal, and aluminum anneal.[1]
Not publicly documented
The following facts about the 450PB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450PB are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 450PB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 450PB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 450PB is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 450PB are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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