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YES

R1

LegacyWet Processing / CleanYES R1 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

R1 — web.archive.org
Fig. 01R1web.archive.org[1]

What is it?

The source describes the YES R1 as an industry-standard machine used for a 5-minute argon plasma clean benchmark. It is mentioned in the context of YES lead frame plasma cleaners and their comparison against this cleaning level.

What can it run?

Process applications and technology nodes documented for this tool.

  • Lead frame plasma cleaning

What do the numbers mean?

Configuration & options2

Plasma clean benchmark
5 minute Argon plasma clean[1]
Accurate?
Referenced use
Industry standard for 15 years[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
R3A-LMCThe source states it is specifically designed for fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines, with parallel plate design, three plasma modes, two plasma gas inputs, and a back-fill gas input.web.archive.org[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the R1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the R1 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the R1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the R1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the R1 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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