Zygo

Newview 7300 Optical

Q: Can this class of system measure transparent films on a substrate?

Yes, many optical profilers can measure transparent films by analyzing the interference signals from multiple interfaces or by using confocal depth discrimination, though film thickness measurement often requires specialized algorithms or additional modules.

Q: What types of surfaces are best suited for optical profilometry?

Smooth to moderately rough surfaces are ideal. Extremely rough or highly diffusive surfaces may cause signal loss or reduce measurement accuracy. Surfaces with high reflectivity generally produce stronger interference signals.

Q: How does ambient vibration affect measurements with such systems?

Optical profilers are sensitive to vibration because they rely on interference patterns that can be disrupted by motion. Many systems are built on vibration-isolation tables or incorporate active compensation to mitigate environmental disturbances.

Q: What maintenance is typically required for an optical profiler?

Routine maintenance includes cleaning optical surfaces, calibrating the stage and sensor, and monitoring the light source intensity. Regular alignment checks ensure measurement repeatability and accuracy over time.

Metrology & Inspection Zygo Newview 7300 family

Research Quality: 50% complete

The Zygo Newview 7300 Optical is a metrology and inspection instrument. The Zygo Newview 7300 Optical is a white light interferometer and optical profilometer. The Zygo Newview 7300 Optical uses non-contact, three-dimensional, scanning white light interferometry.^[1]^[2]^[3]

Newview 7300 Optical — Inventory photo — Fig. 01Newview 7300 OpticalInventory photo^[4]

Power

3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[4]

Performance

≤ 0.75%^[3]

Optics

1X, 5X Objectives^[4]

What it is

The Zygo Newview 7300 Optical is a metrology and inspection instrument.^[1]^[2]

The Zygo NewView 7300 Optical is a white light interferometer and optical profilometer.^[2]^[3]

The Zygo Newview 7300 Optical uses 1X and 5X objectives in one configuration and 5X and 50X objectives in another configuration.^[4]^[5]

How it works

The NewView 7300 uses non-contact, three-dimensional, scanning white light interferometry with a closed-loop piezo-based scanner and capacitive sensors.^[3]

The NewView 7300 uses ZYGO's Coherence Scanning Interferometry technology for three-dimensional optical surface measurement.^[2]

The NewView 7300 includes motorized image zoom, motorized focus, and motorized stage options in some configurations.^[3]^[5]

Where it fits in the process flow

The NewView 7300 is used as a nondestructive surface measurement tool for characterizing topography without sample preparation.^[2]

The NewView 7300 measures surfaces that include opaque, transparent, coated, uncoated, specular, and nonspecular parts.^[3]

Applications

The NewView 7300 is used for step height measurements, surface roughness measurements, and three-dimensional mapping of surfaces.^[2]

The NewView 7300 is used to characterize and quantify surface roughness, step heights, critical dimensions, and other topographical features.^[2]

Why won't it start?

Documented failure modes, common issues, and field considerations.

The Zygo NewView 7300 Optical has been replaced with a new WLI tool.

What do the numbers mean?

Power & electrical3

Dell Core 2 Duo 3.0 GHz OptiPlex 755 minitower (tool-less chassis, 1333 MHz FSB, 4 MB cache)^[4]; 3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[4]
input voltage: 100 to 240 VAC, 50/60 Hz^[3]

Vacuum & pumping1

compressed air: 60 to 80 psi; dry and filtered source; 1/4 in. input^[3]

Optics & imaging17

1X, 5X Objectives^[4]; High-speed digital 640 × 480 high-resolution CCD camera^[4]; High-output, long-life white light LED light source and aperture stop for improved illumination^[4]; Dell USB keyboard & optical mouse^[4]; 5x and 50x objectives – no turret^[5]
objectives: 1X, 2.5X, 5X, 10X, 20X, 50X, 100X^[3]
objective mounting options: Single objective dovetail; manual 6-position turret; motorized 6-position turret^[3]
illuminator: Single white-light LED design^[3]
z-drive: DC brushless microstepper motor with ballscrew drive, 4 in. range, 0.1 μm resolution^[3]
vertical resolution: < 0.1 nm^[3]
lateral resolution: 0.36 to 9.5 μm^[3]
rms repeatability: < 0.01 nm^[3]
stated objectives in inventory listing: 1X, 5X objectives^[4]
stated camera in inventory listing: 640 × 480 high-resolution CCD camera^[4]
stated objectives in inventory listing: 5x and 50x objectives; no turret^[5]
Camera: 640 × 480 high-resolution CCD camera^[4]
Objectives in another configuration: 5x and 50x objectives; no turret^[5]

Performance2

step height accuracy: ≤ 0.75%^[3]
repeatability: ≤ 0.1% @ 1σ^[3]

Control & software7

MetroPro software, Windows XP, and computer (specs below)^[4]; MetroPro 8.3.5 on Dell Windows XP computer^[5]
computer: High-performance Dell PC with LCD monitor^[3]
software: ZYGO MetroPro software running under Microsoft Windows XP^[3]
stated software and computer in inventory listing: MetroPro software, Windows XP, and computer^[4]
stated software in inventory listing: MetroPro 8.3.5 on Dell Windows XP computer^[5]
Control system: MetroPro software on Microsoft Windows XP^[4]

Dimensions & facilities1

measurement technique: Non-contact, three-dimensional, scanning white light interferometry^[3]

Configuration & options37

High-performance closed-loop piezo scanning transducer with capacitive feedback, 150 µm scan length, and high-speed measurement and analysis module^[4]; Minimum scan speed of 14 µm/sec with additional high-speed and sub-Nyquist scan modes up to 135 µm/sec^[4]; Automated, motorized 3-position image zoom^[4]; Field stop for focusing aid^[4]; Integrated 75 mm head riser^[4]; 250 GB SATA hard drive (3.0 Gb/s)^[4]; 48X/32X/48X CD-RW/DVD combo drive^[4]; Dell 1908FP black flat panel SVGA display, 19" viewable^[4]; DVI (Digital) graphics adapter card^[4]; Integrated gigabit network card and AC97 audio^[4]; Motorized 3-axis stages, XY and Z^[5]
scanner: Closed-loop piezo-based, with highly linear capacitive sensors^[3]
field zoom lenses: 0.5X, 0.75X, 1.0X, 1.5X, 2.0X^[3]
image zoom: Motorized 3-position system zoom^[3]
field of view: 0.03 to 14 mm; larger area imaged with field stitching^[3]
measurement array: Selectable 640x480, 320x240, 160x120; optional 992 x 992 (1K)^[3]
focus: Motorized manual and auto focus^[3]
vertical scan range: 150 μm^[3]
extended scan range: 20 mm^[3]
data scan rate: ≤135 μm/sec^[3]
maximum data points: 307,200; 984,064 optional^[3]
test part characteristics: Opaque, transparent, coated, uncoated, specular, and nonspecular surfaces^[3]
maximum sample size: 3.5 x 8 x 8 in. (89 x 203 x 203 mm); larger sample sizes possible^[3]
reflectivity: 1-100%^[3]
temperature: 15 to 30°C^[3]
humidity: 5 to 95% relative, noncondensing^[3]
stated scan length in inventory listing: 150 µm scan length^[4]
stated image zoom in inventory listing: Automated, motorized 3-position image zoom^[4]
stated light source in inventory listing: High-output, long-life white light LED light source^[4]
stated stage in inventory listing: Motorized 3-axis stages, XY and Z^[5]
Field of view: 0.03 to 14 mm^[3]
Scan length: 150 µm^[4]
Image zoom: Automated, motorized 3-position image zoom^[4]
Light source: High-output, long-life white light LED light source^[4]
Head riser: Integrated 75 mm head riser^[4]
Stages: Motorized 3-axis stages, XY and Z^[5]
MetroPro version: MetroPro 8.3.5^[5]

Vintage & configurations

2012Vintage^[4]
One source describes the equipment as 2012 vintage.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationDell Core 2 Duo 3.0 GHz OptiPlex 755 minitower (tool-less chassis, 1333 MHz FSB, 4 MB cache)^[4]
Configuration3.0 GB DDR2 Non-ECC SDRAM, 667 MHz^[4]
input voltage100 to 240 VAC, 50/60 Hz^[3]
compressed air60 to 80 psi; dry and filtered source; 1/4 in. input^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Can this class of system measure transparent films on a substrate?General reference — not yet source-verified

Yes, many optical profilers can measure transparent films by analyzing the interference signals from multiple interfaces or by using confocal depth discrimination, though film thickness measurement often requires specialized algorithms or additional modules.

What types of surfaces are best suited for optical profilometry?General reference — not yet source-verified

Smooth to moderately rough surfaces are ideal. Extremely rough or highly diffusive surfaces may cause signal loss or reduce measurement accuracy. Surfaces with high reflectivity generally produce stronger interference signals.

How does ambient vibration affect measurements with such systems?General reference — not yet source-verified

Optical profilers are sensitive to vibration because they rely on interference patterns that can be disrupted by motion. Many systems are built on vibration-isolation tables or incorporate active compensation to mitigate environmental disturbances.

What maintenance is typically required for an optical profiler?General reference — not yet source-verified

Routine maintenance includes cleaning optical surfaces, calibrating the stage and sensor, and monitoring the light source intensity. Regular alignment checks ensure measurement repeatability and accuracy over time.

Not publicly documented

The following facts about the Newview 7300 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the Newview 7300 Optical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Newview 7300 Optical are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Newview 7300 Optical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Newview 7300 Optical are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Newview 7300 Optical are on record.
Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Newview 7300 Optical — Zygo | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[2]Zygo NewView 7300 Optical Profilometer - The Singh Center for Nanotechnology Wiki — wiki.nano.upenn.eduwiki.nano.upenn.edu
[3]lambdaphoto.co.uk — lambdaphoto.co.uklambdaphoto.co.uk
[4]Equipment inventory listing
[5]Inventory photo
[6]Inventory photo