Oxford Instruments
plasmapro-ngp80-rie alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Plasma-Therm
720/740
200mm
Etch
The Plasma Therm 720/740 is a dual-chamber RIE loadlocked system with chlorine- and fluorine-based chemistry.
Tegal
980
200mm
Etch
Tegal 980 ACS is a plasma etch system series described as serving the 200mm fab line.
memsstar
Orbis Alpha
200mm
Etch
The Memsstar Orbis Alpha Oxide Etch System is a small-footprint, self-contained oxide etch system that uses hydrogen fluoride etchants.
Oxford Instruments
Plasmalab 80 Plus
200mm
Etch
Oxford Instruments Plasmalab 80+ is a compact open-loading reactive ion etch system for R&D or small-scale production.
Oxford Instruments
PlasmaPro80
200mm
Etch
Oxford Instruments PlasmaPro80 is an RIE dry etcher used for hBN, SiGe, graphite, and graphene etching.
Oxford Instruments
100 ICP Fluorine
Etch
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