Applied Materials
UVision 600 SP
The Applied Materials UVision 600 SP is an inspection system that uses deep UV illumination. The Applied Materials UVision 600 SP handles wafers with a FOUP loading configuration supporting 2 positions. The Applied Materials UVision 600 SP operates on Windows XP.[1]
What it is
The Applied Materials UVision 600 SP is a metrology and inspection system. The Applied Materials UVision 600 SP is configured for FOUP loading with two loadport positions. The Applied Materials UVision 600 SP uses deep UV illumination. The Applied Materials UVision 600 SP operates on Windows XP software version 7.5_1. The Applied Materials UVision 600 SP includes an ASYST Isoport loadport, an operation console, a Yaskawa teach pendent, and TKM PDC Deep UV.[1][2]
How it works
The Applied Materials UVision 600 SP uses deep UV illumination. The Applied Materials UVision 600 SP is configured for FOUP loading with two positions and uses an ASYST Isoport loadport. The Applied Materials UVision 600 SP has a carrier reader ID of OHT. The Applied Materials UVision 600 SP uses Windows XP and software version 7.5_1.[1][2]
Where it fits in the process flow
The Applied Materials UVision 600 SP is suited to carrier-based material movement because the configuration includes FOUP loading and loadport handling.[2]
Applications
General reference — not yet source-verifiedMetrology and inspection systems are used for semiconductor process inspection, defect screening, and condition verification on production material.
What do the numbers mean?
Wafer handling1
Optics & imaging1
Control & software2
Configuration & options14
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the UVision 600 SP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UVision 600 SP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UVision 600 SP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UVision 600 SP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UVision 600 SP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UVision 600 SP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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