Waferpedia

Nikon

NSR SF 200

Nikon NSR family
Research Quality: 30% complete
NSR SF 200 — Inventory photo
Fig. 01NSR SF 200Inventory photo[1]

Performance

OF[1]

Optics

6"[1]

What is it?

The Nikon NSR SF 200 is a semiconductor equipment tool identified with a 6-inch wafer size.

What do the numbers mean?

Wafer handling3

Wafer Chuck Type
Pin[1]
Accurate?
Wafer Loader Type
Type 3[1]
Accurate?
Wafer Carrier Table
Right[1]
Accurate?

Optics & imaging7

Reticle Size
6"[1]
Accurate?
Reticle Barcode Reader[1]
Accurate?
Reticle Case Barcode Reader[1]
Accurate?
Reticle PD/PPD
YEs[1]
Accurate?
Reticle SMIF
No[1]
Accurate?
Laser
Gigaphoton G21K2[1]
Accurate?
Laser Total Shot
19420.349 Mpls[1]
Accurate?

Performance2

Pre Alignment 2
OF[1]
Accurate?
Alignment Sensor
LSA/FIA/LIA[1]
Accurate?

Control & software2

Mini Computer
Alpha[1]
Accurate?
Software Version
MCSV: Ver E5.21F Tool[1]
Accurate?

Configuration & options5

HDD not included[1]
Accurate?
Chamber Type
Asahi[1]
Accurate?
Field Size
26[1]
Accurate?
RL Linrary
L10+10[1]
Accurate?
In-Line
Right[1]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NSR SF 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR SF 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR SF 200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR SF 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR SF 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR SF 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Nikon Precision Incnikonprecision.com (Jun 27, 2006)web.archive.org
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Last updated Jul 29, 2026.

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