Hamatech

HMR900

Lithography Hamatech HMR900 family

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HMR900 — epfl.ch — Fig. 01HMR900epfl.ch^[1]

Performance

+/-1 rpm^[1]

Optics

Mask processor^[1]

What is it?

The Hamatech HMR900 is described as a tool dedicated to Cr-plate wet processing or cleaning, with three installed media for developing exposed resist, Cr wet etching, and resist stripping, plus intermediate DI water rinse steps and final drying. It is designed to handle square plates up to 7" x 7" and includes manual loading and unloading, multi-size chucks, and direct/reverse rotation.

What can it run?

Process applications and technology nodes documented for this tool.

Developing exposed resist
Cr wet etching
Resist stripping

Why won't it start?

Documented failure modes, common issues, and field considerations.

Chucks for Cr plates do not use vacuum clamping; only mechanical corner-stops hold the plates during processing.
Take care for correct substrate loading.

What do the numbers mean?

Vacuum & pumping1

Substrate fixation: Mechanical side edge substrate fixation; chucks for Cr plates do not use vacuum clamping^[1]

Wafer handling3

Substrate size: Square plates up to 7" x 7"^[1]
Supported chuck sizes: 4" x 4", 5" x 5", 6" x 6", and 7" x 7" square plates^[1]
Loading: Manual loading and unloading of substrates^[1]

Gas & chemistry1

Installed media: Developing exposed resist (AZ 351B developer), Cr wet etching (TechniEtch Cr N°1), and resist stripping (AZ 400K non-diluted)^[1]

Optics & imaging1

Tool type: Mask processor^[1]

Performance1

Speed accuracy: +/-1 rpm^[1]

Control & software1

Programmable recipes: 20 recipes with 50 steps each^[1]

Configuration & options2

Primary use: Cr-plate wet processing or cleaning^[1]
Rotation: Direct and reverse rotation (CW, CCW)^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Installed mediaDeveloping exposed resist (AZ 351B developer), Cr wet etching (TechniEtch Cr N°1), and resist stripping (AZ 400K non-diluted)^[1]
Substrate fixationMechanical side edge substrate fixation; chucks for Cr plates do not use vacuum clamping^[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

User ManualManualepfl.ch

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the HMR900 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HMR900 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HMR900 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HMR900 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the HMR900 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the HMR900 are on record.
Answerable by: an OEM parts catalog or a service engineer