KLA
Candela CS 920 Surface Analyzer
The KLA Candela CS 920 Surface Analyzer is a metrology and inspection tool. The KLA Candela CS 920 Surface Analyzer includes a PSC Calibration Wafer. The KLA Candela CS 920 Surface Analyzer is specified for a 6 inch wafer size.[1][2]
Wafer size
Includes PSC Calibration Wafer
Power
230 V[2]
What it is
General reference — not yet source-verifiedSurface analyzers are inspection tools used to examine wafer surfaces for defects, contamination, and other surface anomalies. Surface analyzers typically support process monitoring by checking surface condition without altering the wafer.
How it works
General reference — not yet source-verifiedSurface analyzers generally direct controlled illumination onto a wafer and collect the reflected or scattered optical signal to detect localized surface departures from the surrounding background. Surface analyzers generally convert that optical response into defect maps or review data used for inspection and process control.
Where it fits in the process flow
General reference — not yet source-verifiedSurface analyzers are used at inspection points across wafer manufacturing where surface cleanliness and defectivity must be checked before or after process steps. Surface analyzers commonly fit between deposition, etch, clean, polish, and lithography-related operations as in-line or off-line monitors for wafer surface condition.
Applications
General reference — not yet source-verifiedSurface analyzers are applied to wafer inspection tasks where particles, scratches, haze, residue, and other surface defects can affect downstream yield. Surface analyzers are used on production wafers, monitor wafers, and reference wafers to support defect reduction and surface quality control.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What software version is installed on the Candela CS 920?
The system is running software version 10.2.4.0101.[7]
Does the Candela CS 920 include a wafer handler?
The system does not have a handler.[7]
What are the electrical requirements of the Candela CS 920?
The system requires a 230 V, 20 A, single-phase, three-wire supply at 50/60 Hz.[2]
Does the Candela CS 920 come with a calibration wafer?
The system includes a PSC calibration wafer.[2]
Not publicly documented
The following facts about the Candela CS 920 Surface Analyzer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 920 Surface Analyzer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 920 Surface Analyzer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela CS 920 Surface Analyzer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 920 Surface Analyzer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 920 Surface Analyzer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]cncmachines.com — cncmachines.comcncmachines.com
Last updated Oct 17, 2026.
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