KLA
Surfscan 6100 Wafer
What it is
The KLA Surfscan 6100 is a wafer inspection system used for metrology and inspection. The equipment identified here is a KLA model Surfscan 6100 Wafer Inspection System.[1][2]
How it works
Listed upgrades and replacements include a new single board computer at 800 MHz, USB 2.0 ports, solid-state hard drives, a color LCD monitor, a user interface keypad, and a PS/2 keyboard and optical mouse. One description also mentions upgraded circuit boards including motor distribution, 4 channel motor, INSW, GPIO, below wafer, CPU 800 MHz with USB 2.0, solid state hard drives, distribution backplane, analog, and key pad/laser mouse.[1][2]
Other described mechanical and serviceable elements include an advanced lead screw upgrade, new motors, rebuilt new style indexers, a refurbished load arm and lead screw, calibration of cassette elevators, and cleaning or replacement of optics and mirrors as needed.[1][2]
Applications
What do the numbers mean?
Power & electrical3
- CPU 800Mhz with USB 2.0[1]
Wafer handling2
- Rebuilt New style indexers.[1]
Optics & imaging5
Configuration & options14
- 17A[1]
- Advanced Lead screw Upgrade.[1]
- New Motors.[1]
- Upgraded circuit boards (2025):[1]
- Motor Distribution[1]
- 4 Channel Motor[1]
- INSW[1]
- GPIO[1]
- Solid State Hard Drives[1]
- Distribution Backplane[1]
- Analog[1]
- Refurbished[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Surfscan 6100 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6100 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6100 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6100 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6100 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6100 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Jul 29, 2026.
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