Laurell

WS-650

Spin coater 150mm Laurell WS-650 family

Research Quality: 40% complete

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LaurellWS-650

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Preceded by

400-series

This tool

WS-650

Succeeded by

Latest generation

All related

What is it?

The Laurell WS-650 Spincoater is described as cleanroom instrumentation and is installed in a photolithography hood. The source states it should be used only for spincoating photoresists, and lists speed and substrate-adapter capabilities.

What can it run?

Process applications and technology nodes documented for this tool.

Spincoating photoresists

What do the numbers mean?

Wafer handling3

Substrate size: Up to 150 mm round substrates and 125 mm square substrates^[1]
Substrate thickness: 0.1 to 1 mm^[1]
Adapter: Wafer Fragment Adapter for 10–50 mm substrate fragments^[1]

Configuration & options6

Equipment type: Cleanroom Instrumentation; Thin Film Fabrication^[1]
Use: Should be used only for spincoating of photoresists^[1]
Speed range: 100-12,000 RPM^[1]
Adapter: Microscope Slide adapter^[1]
Location: FNT 4.106^[1]
Installed location: Photolithography hood^[1]

Vintage & configurations

LineagePreceded by 400-series All related models

Interested in this tool?

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What replaced it?

predecessorLaurell 400-series— The WS-650 controller is stated to have replaced the WS-400.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS-650 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-650 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-650 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
[2]web.archive.orgweb.archive.org
[3]https://aggiefab.tamu.edu/wp-content/uploads/2021/04/Operation-Spec-Laurell-Spin-Coater.pdf — aggiefab.tamu.eduaggiefab.tamu.edu
[4]Cleanroom Instrumentation — tmi.utexas.edutmi.utexas.edu