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OAI

808-Aligner-Tool-Procedu

Lithography100mmOAI 808-Aligner-Tool-Procedu family
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OAI808-Aligner-Tool-Procedu
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Wafer size

100mm

Performance

1 µm to 2 µm[1]

Optics

OAI Model 800 Mask Aligner[1]

What is it?

The source describes the OAI Model 800 Mask Aligner as a semi-automated optical front- and backside mask aligner with four cameras. It is stated to deliver 1 µm to 2 µm alignment accuracy and to include motorized backside focus, motorized auto leveling, and auto gap setting. Listed specifications include support for 2", 100 mm, 150 mm, and 200 mm pieces, thickness from 0.1 to 10 mm, and exposure wavelength of 350 to 450 nm using a 350 W mercury arc lamp.

What can it run?

Process applications and technology nodes documented for this tool.

  • Lithography

What do the numbers mean?

Vacuum & pumping1

Resolution
Vacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1]
Accurate?

Optics & imaging5

Model
OAI Model 800 Mask Aligner[1]
Accurate?
Camera count
Four-camera[1]
Accurate?
Alignment type
Optical front- and backside mask aligner[1]
Accurate?
Mask size
4"x4"; 5"x5"; 7"x7"; 9"x9"[1]
Accurate?
Exposure wavelength
350–450 nm[1]
Accurate?

Performance4

Alignment accuracy
1 µm to 2 µm[1]
Accurate?
Top side alignment
± 1.0 µm 3σ[1]
Accurate?
Bottom side alignment
± 1.25 µm 3σ[1]
Accurate?
Large gap alignment
Option / ± 1.5 µm 3σ[1]
Accurate?

Configuration & options7

Automation
Semi-automated[1]
Accurate?
Backside focus
Motorized[1]
Accurate?
Auto leveling
Motorized[1]
Accurate?
Gap setting
Auto gap setting[1]
Accurate?
Supported piece size
2", 100mm, 150mm, 200mm, pieces[1]
Accurate?
Thickness range
0.1–10 mm[1]
Accurate?
Lamp
Mercury arc lamp, 350 W[1]
Accurate?
Interested in this tool?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ResolutionVacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 808-Aligner-Tool-Procedu are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 808-Aligner-Tool-Procedu are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 808-Aligner-Tool-Procedu are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 808-Aligner-Tool-Procedu are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 808-Aligner-Tool-Procedu are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 808-Aligner-Tool-Procedu is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
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Last updated Jul 29, 2026.

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