Signatone

S-302-4

Test & Probe 100mm Signatone S-302-4 family

Research Quality: 30% complete

SignatoneS-302-4

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What is it?

The Signatone S-302-4 is listed as part of a probe station setup and is described as a four point resistivity probe station. The source states that it is used to make sheet resistance and resistivity measurements of substrates and thin films, and that it interfaces with a Keithley 2450 to perform these measurements.

What can it run?

Process applications and technology nodes documented for this tool.

Sheet resistance measurements
Resistivity measurements of substrates
Resistivity measurements of thin films

What do the numbers mean?

Wafer handling1

Measurement use: Sheet resistance and resistivity measurements of substrates and thin films^[1]

Control & software1

Interfaces with: Keithley 2450^[1]

Configuration & options3

Type: Four Point Resistivity Probe Station^[1]
Probe stand: 100 mm^[1]
Probe head: 4 point probe head with 5 mil radius tips of 40 mil spacing^[1]

Interested in this tool?

Embed spec card

What replaced it?

siblingCascade Microtech EPS150— Four-point resistivity probe station used with the probe station system.source^[1]
siblingCascade Microtech EPS150TRIAX— Listed as a separate four point resistivity probe station component in the same probe-station equipment set.source^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S-302-4 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-302-4 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S-302-4 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S-302-4 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S-302-4 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S-302-4 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
[2]https://smif.pratt.duke.edu/sites/smif.pratt.duke.edu/files/2023/PROBE2%20Operating%20Procedure%20Rev-2023-06.pdf — smif.pratt.duke.edusmif.pratt.duke.edu