Tokyo Electron
Alpha 85 Z
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Alpha 85 Z is a thermal/diffusion furnace manufactured by Tokyo Electron. The Alpha 85 Z handles 8-inch wafers. The Alpha 85 Z is configured for POCL3 processing.[1]
What it is
General reference — not yet source-verifiedThe Tokyo Electron Alpha 85 Z is a diffusion furnace classified under the Thermal / Diffusion equipment category. Diffusion furnaces are used in semiconductor manufacturing for processes such as thermal oxidation, dopant diffusion, and annealing of silicon wafers.
Where it fits in the process flow
General reference — not yet source-verifiedThe furnace process is typically preceded by a cleaning step (e.g., RCA clean) and may be followed by a drive-in anneal or oxidation step to activate and diffuse the dopant further.
What do the numbers mean?
Wafer handling1
Configuration & options6
- POCL3[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Why is controlled atmosphere important in this class of machine?General reference — not yet source-verified
The chamber environment helps ensure that heat treatment occurs consistently and that the wafer surface is not exposed to uncontrolled contamination or unwanted reactions.
Not publicly documented
The following facts about the Alpha 85 Z are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha 85 Z are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha 85 Z are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha 85 Z are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha 85 Z are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha 85 Z is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
Last updated Oct 12, 2026.
Compare with similar tools
View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
The Varian 0332 F 9453 302 Diffusion is a diffusion pump.