Waferpedia

Tokyo Electron

WDF DP

Test & ProbeTokyo Electron WDF DP family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

General reference — not yet source-verified

A wafer prober is a test-stage machine that brings probe needles or probe contacts into electrical contact with pads on semiconductor wafers before final device package test. Wafer probers sit in the front-end test flow and support wafer-level electrical characterization, sorting, and defect screening.

How it works

General reference — not yet source-verified

The WDF DP belongs to a class of probe stations that position a wafer with precision and move probe hardware until electrical contact is made with device pads. Wafer probers typically combine a motion stage, alignment controls, and temperature-control functions so electrical measurements can be made under controlled conditions.

Applications

General reference — not yet source-verified

The WDF DP is used for wafer-level electrical test of semiconductor devices. Wafer probers are used for device characterization, parametric evaluation, yield screening, and go or no-go testing before wafer processing advances to later manufacturing steps.

What do the numbers mean?

Wafer handling4

Equipment type
Wafer prober[2]
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Product type
Wafer prober[2]
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Tool type
wafer prober[3]
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Wafer size capability
300mm[3]
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Configuration & options5

Defective[1]
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Make
Tel[2]
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Model
WDF DP[2]
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OEM
Tokyo Electron[3]
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Product category
Test[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Tokyo Electron WDF DP?

The Tokyo Electron WDF DP is a wafer prober used for semiconductor testing and probing.[2][1][4][3]

Not publicly documented

The following facts about the WDF DP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WDF DP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WDF DP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WDF DP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WDF DP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WDF DP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]web.archive.org — tel.com (Apr 14, 2005)web.archive.org
  4. [4]Equipment inventory listing
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Last updated Oct 13, 2026.

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