Despatch
AST-1100
What it is
The Despatch AST-1100 is an automated photoresist bake tool and clean-process batch oven.[1]
What do the numbers mean?
Power & electrical1
- Options
- FOUP ID reader, 2-level monitoring, wafer ID reader, uninterruptible power supply (UPS)[1]
Wafer handling4
- Temperature uniformity
- +/-1.0 °C between wafers and across all 25 wafers in the chamber at dunk temperature[1]
- Automation features
- Supports two front-opening unified pod (FOUP) load stations, a class 1 cleanroom-compatible robot, and an optically based class 1 laser cassette imaging sensor[1]
Dimensions & facilities1
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- OptionsFOUP ID reader, 2-level monitoring, wafer ID reader, uninterruptible power supply (UPS)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the AST-1100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST-1100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AST-1100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AST-1100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AST-1100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AST-1100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 26, 2026.
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