MPI
TS 3500 Automatic Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The MPI TS 3500 Automatic Wafer is an automated wafer prober for test and probe work on wafers. The MPI TS 3500 Automatic Wafer is a 300 mm fully automated probe station in the TS3500 series. The MPI TS 3500 Automatic Wafer supports a Wafer ID Reader option.[1][2][3]
What it is
How it works
The TS 3500 uses programmable chuck motion, programmable microscope motion, wafer pre-alignment, and cassette handling features to automate wafer loading and probing.[3]
The TS 3500 series supports wafer loading through manual trays, cassette-based loading, and WaferWallet options for automated handling.[2][3]
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling5
Control & software1
Configuration & options17
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TS3500-IFE | — | — | Fully automated probe station with IceFreeEnvironment; supports measurements down to -60°C; described as equivalent in features to TS3000-IFE with added fully-automated capability. | mpi-corporation.com[2] |
| TS3500-SE | — | — | Fully automated probe station with ShielDEnvironment; described as equivalent in features to TS3000-SE with added fully-automated capability. | mpi-corporation.com[2] |
| TS3500-SE with WaferWallet | — | — | TS3500-SE configuration with WaferWallet option. | mpi-corporation.com[2] |
| TS3500-SE with WaferWallet MAX | — | — | TS3500-SE configuration with WaferWallet MAX option. | mpi-corporation.com[2] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the TS 3500 Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS 3500 Automatic Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TS 3500 Automatic Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TS 3500 Automatic Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TS 3500 Automatic Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TS 3500 Automatic Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]mpi-corporation.com — mpi-corporation.commpi-corporation.com
- [3]mpi.com.tw — mpi.com.twmpi.com.tw
- [4]Inventory photo
- [5]https://www.mpi-corporation.com/wp-content/uploads/ASTPDF/MPI-TS3500-IFE-Automated-Probe-System-Data-Sheet.pdf — mpi-corporation.commpi-corporation.com
Last updated Oct 11, 2026.
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