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Nikon

NSR 2205 i 12 D

Test & ProbeNikon NSR 2205 family
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NSR 2205 i 12 D — Inventory photo
Fig. 01NSR 2205 i 12 DInventory photo[1]

What it is

General reference — not yet source-verified

The NSR 2205 i 12 D sits in the photolithography portion of semiconductor manufacturing, where patterned exposure transfers circuit features onto a wafer using a mask, optical alignment, and precision stage motion.

How it works

In this model family, the equipment interface details include SECS-based CIM, an open-cassette factory interface, and a handler system designated WL Type 3. One configuration also notes a Vax Station and pin chuck.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

The tool belongs early in wafer fabrication, before etch, implant, deposition, and other downstream pattern-transfer steps. It is used after resist coating and alignment preparation, and before the exposed pattern is developed and transferred into the underlying film stack.

Applications

General reference — not yet source-verified

Equipment of this class is used for patterning integrated circuits, discrete devices, and other microfabricated structures on silicon wafers. It is also used wherever precise repeatable optical transfer of a circuit layer is needed in semiconductor manufacturing.

What do the numbers mean?

Wafer handling4

Handler System
WL Type 3[1]
Accurate?
Factory interface
Open Cassette[1]
Accurate?
Factory Interface
Open Cassette (2)[2]
Accurate?
Vax Station, Pin Chuck[2]
Accurate?

Control & software1

Software Version
MCSV 2.41, OCSV 2.41[1]
Accurate?

Configuration & options1

CIM
SECS[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What is a test and probe system used for?General reference — not yet source-verified

It is used to make controlled electrical contact with semiconductor devices or test structures so they can be measured, verified, and classified before later manufacturing steps.

What does the probing part do?General reference — not yet source-verified

The probing part brings conductive contacts into alignment with the target pads or nodes and maintains a stable connection long enough for electrical measurements to be taken.

What kinds of measurements does this class support?General reference — not yet source-verified

Such systems support electrical checks such as continuity, leakage, functional response, and other parametric measurements depending on the device and test setup.

Where is this equipment used in semiconductor manufacturing?General reference — not yet source-verified

It is typically used at wafer-level or other pre-package test stages, as well as in engineering and process development environments.

Not publicly documented

The following facts about the NSR 2205 i 12 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 12 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 12 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 2205 i 12 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2205 i 12 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2205 i 12 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing
  8. [8]Used Equipment | Nikon Precision | Global Sitenikonprecision.com (Mar 25, 2015)web.archive.org
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Last updated Jul 29, 2026.

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