Tegal
6540
Wafer size
100mm
Node / era
down to 90nm
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- MEMS fabrication
- removing hard-to-etch materials
- high-K decoupling capacitors
- cell phones
- other wireless devices
- noble metal electrodes and capacitor structures
- ferroelectric materials
- high-K dielectric materials
- compound semiconductor materials
- interconnect materials
- DRAM devices
- embedded memory devices
- FeRAM device manufacturing
What do the numbers mean?
Power & electrical1
- Plasma technology
- dual-frequency RF power technology / dual-frequency RF power application[1]
Wafer handling1
Configuration & options7
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 6540 HRe | — | — | Same 6540 line name used for a version described as a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement; wafer size stated as 100mm–200mm and optimized down to 90nm. | web.archive.org[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Plasma technologydual-frequency RF power technology / dual-frequency RF power application[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 6540 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6540 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 6540 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6540 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 6540 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 6540 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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