Waferpedia

Nikon

NSR 2205 i 8

Precision OpticsNikon NSR 2205 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

NSR 2205 i 8 — Inventory photo
Fig. 01NSR 2205 i 8Inventory photo[1]

What it is

The Nikon NSR 2205 i 8 is a Nikon lithography tool.[3][2]

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[3]
Accurate?

Optics & imaging3

6" reticle[1]
Accurate?
Optics
6" reticle[2]
Accurate?
Category
Precision Optics[2]
Accurate?

Configuration & options3

no HDD[2]
Accurate?
Manufacturer
Nikon[2]
Accurate?
Model
NSR 2205 i 8[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
NSR 2205 i 8 A i-Linei-line—Listed as a 6-inch wafer lithography stepper with 0.5 µm resolution.waferpedia.com[4]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What substrates can be processed by this class of equipment?General reference — not yet source-verified

As a general class, these systems process flat, polished substrates coated with photoresist. The most common substrates are semiconductor wafers, although similarly prepared substrates used in related microfabrication processes can also be handled.

What role do the precision optics play in pattern placement accuracy?General reference — not yet source-verified

The projection optics determine image resolution and fidelity, while the alignment system and precision stage work together with the optics to place each exposed image in its correct position relative to features already present on the substrate. Accurate overlay depends on the combined performance of the entire optical and mechanical system.

Not publicly documented

The following facts about the NSR 2205 i 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the NSR 2205 i 8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2205 i 8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2205 i 8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NSR 2205 i 8 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 13, 2026.

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