Nikon
NSR 2205 i 14 E 2 i-Line
What is it?
What do the numbers mean?
Wafer handling1
Optics & imaging4
Performance2
Control & software1
- Computer Type:[4]
Configuration & options18
- Asahi N 4 A-C Chamber:[4]
- Set Temperature:[4]
- Alpha Station[4]
- HP Alpha Alpha Server DS 15 A[4]
- HP Alpha Server DS 15 A[5]
- Asahi N 4 Z Chamber:[6]
- Asahi N 4 A-B Chamber:[7]
- Smart Modular Technology[7]
- ETM 25 SA[7]
- Nikon Nest[8]
- Fully Refurbished[9]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSR 2205 i 14 E 2 | i-Line | 2001–2008 | Sources show different listed vintages and configurations across entries, including Asahi N 4 A-C or Asahi N 4 Z chamber, different computer types, and MCSV versions 3.43 C, 3.46 C, and 3.46 D. | Equipment inventory listing[8] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- ASML PAS 5500— Same function class: Lithography, 200mmCompare in depthsource[10]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NSR 2205 i 14 E 2 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 14 E 2 i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSR 2205 i 14 E 2 i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 14 E 2 i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 14 E 2 i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR 2205 i 14 E 2 i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
- [5]inventory listing
- [6]inventory listing
- [7]inventory listing
- [8]inventory listing
- [9]inventory listing
- [10]nist.govnist.gov
Last updated Jul 29, 2026.
Compare with similar tools
View all →
The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.
