EV Group
Gemini Automated Production Wafer
Plate 01EVG Gemini Fully Automated Production Bonding System
Lithography Equipment SupportWatch on YouTube
Wafer size
200mm
Performance
with Face to Face Alignment[1]
Gas delivery
1 purge gas line for process gas[1]
What is it?
What do the numbers mean?
Wafer handling3
Gas & chemistry1
- 1 purge gas line for process gas[1]
Optics & imaging1
- SmartView®NT Alignment Module with 5x Objectives[1]
Performance2
Control & software2
Configuration & options9
- Interlocked doors with signal light tower[1]
- Flexible process flow definition[1]
- Parallel processing of multiple jobs[1]
- Automated recording of process and machine parameters[1]
- Password protected user access levels[1]
- Formic Acid Bubbler option for purging formic acid vapor into bond chamber[1]
- CE Certified[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration1 purge gas line for process gas[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Gemini Automated Production Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gemini Automated Production Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gemini Automated Production Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gemini Automated Production Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gemini Automated Production Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gemini Automated Production Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]EV Group - 产品 — evgroup.com (Feb 18, 2005)web.archive.org
Last updated Jul 29, 2026.
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