Applied Materials
Centura 5200 High K
The Applied Materials Centura 5200 High K is a semiconductor process chamber used for depositing high-k dielectric films. The Centura 5200 High K handles 8-inch wafers. The Centura 5200 High K is a single chamber unit, not a complete cluster tool.[1][2][3]
What it is
How it works
The Centura 5200 High K chamber is equipped with a microwave generator and waveguide for plasma generation. The chamber includes a gas box and a remote frame for precursor delivery, as well as a precursor gas box for volatile precursor materials. A generator rack houses associated power supply components.[2][3][4]
Where it fits in the process flow
The Centura 5200 High K process chamber is used for depositing high-k dielectric films in semiconductor device fabrication.[1]
Applications
The Centura 5200 High K is applied to the deposition of high-k dielectric films.[1]
What do the numbers mean?
Power & electrical2
Wafer handling1
Gas & chemistry2
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Centura 5200 High K chamber support?
The Centura 5200 High K chamber supports 8-inch (200 mm) wafers.[2][1][4]
Is the Centura 5200 High K a complete cluster tool?
No, the Centura 5200 High K is a single chamber unit, not a complete cluster tool.[1]
What type of films does the Centura 5200 High K deposit?
The Centura 5200 High K deposits high-k dielectric films.[1]
What platform is the Centura 5200 High K part of?
The Centura 5200 High K is part of the Applied Materials Centura platform family.[1]
Not publicly documented
The following facts about the Centura 5200 High K are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 High K are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura 5200 High K are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura 5200 High K are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 High K are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 High K is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 11, 2026.
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