Fab Operation
Labs, QA, characterization
Failure-analysis and metrology labs: cross-sectioning, imaging, electrical fault isolation, and materials characterization.
Metrology & Inspection
Optical first, SEM second — most labs pair the two
The FEI Nova 600i (also called Nova NanoLab 600i) is a DualBeam system combining a field emission scanning electron microscope (FESEM) with a gallium focused ion beam (Ga FIB) for nanoscale prototyping, machining, characterization, and analysis of structures below 100 nm.
The Leica DM2700 M is an upright materials microscope with universal white light LED illumination designed for routine inspection tasks in metallography, earth science, forensic investigation, and materials quality control and research.
The ZEISS Axioscope 5 is a smart upright microscope designed for biomedical routine and research, featuring automatic digital documentation with a Snap button and support for multiple contrast techniques.
Test & Probe
The Agilent 11729C Carrier Noise Test Set is an integral part of a phase noise measurement system, capable of up-converting, down-converting, and phase/frequency demodulation.
The KLA 1007 is a wafer prober manufactured by KLA.
The Cascade Microtech 103-754 is an x-y-z-θ probe positioner used in the HFTL 50-GHz Small-Signal Probe Station.
The Electroglas 2001 CX Automatic Wafer Prober is an automatic wafer prober designed for wafer test and sort.
Dicing & Grinding
Cross-section prep pairs polishing with the imaging queue
The Disco DAD641 is an automatic dicing saw used for wafer dicing operations.
The Disco DAD3241 is a high-productivity automatic dicing saw that supports large workpieces up to Φ8”.
The Disco 3220 is a dicing saw used for wafer singulation in semiconductor backend processing.
Wet Processing / Clean
The EVG 301 is a semi-automated single wafer cleaning system for R&D, featuring megasonic cleaning, spinner rotation up to 3000 rpm, and optional pre-bonding and IR-inspection modules.
The DISCO DCS1460 is an automatic cleaning system for Φ300 mm wafers used to clean workpieces that have been cut on a dicing saw.
The Ultratech 602 Plate Mask Cleaner is a cleaning tool designed for masks and plates in semiconductor manufacturing.
The Tokyo Electron Clean Track Lithius Pro V is a resist coater/developer for 12-inch wafers, described as a multi-block system.
Precision Optics
The SCIEX API 3000 is a triple quadrupole LC/MS/MS mass spectrometer used for analytical applications such as protein and peptide analysis, small molecule drug metabolism studies, and pharmacokinetic screening.
The Bruker Contour R1 is a 3D optical metrology system used for non-contact surface characterization.
The SCIEX API 2000 is a compact triple-quadrupole LC/MS/MS system introduced in 1998.
The Perkin Elmer 1050 UV-VIS Spectrometer is an instrument used for analyzing ultraviolet and visible light absorption spectra.
The Zygo Zegage 3D Optical Surface Profiler is a non-contact optical profiler for measuring surface topography.
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