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AJA

BSG-200Series

Substrate holder200mmAJA BSG-200Series family
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BSG-200Series — web.archive.org
Fig. 01BSG-200Seriesweb.archive.org[1]

Wafer size

200mm

Gas delivery

He, Ar or N2 gas cooling[1]

What is it?

The AJA BSG-200 Series Substrate Holder is designed to handle wafers or similar planar substrates up to 200 mm in diameter. It features direct backside He, Ar or N2 gas cooling while rotating, includes a peripheral weight ring to help maintain higher backside gas pressure for heat transfer, and is described as load-lock compatible.

What do the numbers mean?

Vacuum & pumping1

Backside gas pressure feature
Peripheral weight ring around the outer edge of the substrates helps maintain a 2 orders of magnitude higher backside gas pressure[1]
Accurate?

Wafer handling1

Supported substrate size
Wafers or similar planar substrates up to 200 mm in diameter[1]
Accurate?

Gas & chemistry1

Backside cooling gases
He, Ar or N2 gas cooling[1]
Accurate?

Configuration & options2

Rotation
Rotating[1]
Accurate?
Compatibility
Load-lock compatible[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Backside cooling gasesHe, Ar or N2 gas cooling[1]
  • Backside gas pressure featurePeripheral weight ring around the outer edge of the substrates helps maintain a 2 orders of magnitude higher backside gas pressure[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the BSG-200Series are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BSG-200Series are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the BSG-200Series are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the BSG-200Series are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the BSG-200Series are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the BSG-200Series is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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BSG-200AJA

The AJA BSG-200 Series Substrate Holder is a backside-gas-cooled rotating substrate holder for wafers or similar planar substrates up to 200 mm in diameter.

CategorySubstrate holderWafer200mm
6 specs
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